1995
DOI: 10.1116/1.579860
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Simultaneous deposition and lamination process in vacuum

Abstract: Laminating a protective layer onto a freshly deposited metal film on a web in a vacuum chamber is very useful in many applications where the deposited film must be protected from scratches or from reacting with the atmosphere when it is removed from the vacuum chamber. Some materials will oxidize in the atmosphere very quickly, causing undesirable changes in the film’s properties. When a laminated protective coverlay is used, the material can be protected until it is further processed or put into final use. A … Show more

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