Abstract:With an Expanding Thermal Plasma Chemical Vapor Deposition system (ETP-CVD), solar grade amorphous silicon (a-Si:H) can be deposited at high deposition rate (> 2 nm/s). We think that during the first stage of deposition, a material is grown with a higher defect density than the rest of the bulk creating a defect-rich layer (DRL). Therefore we analyzed, by the means of simulations, the influence of the position of the DRL on the performance of a p-i-n a-Si:H solar cell when moved from the p-i towards the i-n… Show more
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