Simulation study on the robustness of polar mark for incident light polarization states

Zhou, Guangying; Qi, Yuejing; Yao, Mingyi; Li, Liang; Jiang, Miao; Shi, Jiangliu

doi:10.1109/iwaps60466.2023.10366112

2023 International Workshop on Advanced Patterning Solutions (IWAPS) 2023

DOI: 10.1109/iwaps60466.2023.10366112

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Simulation study on the robustness of polar mark for incident light polarization states

Guangying Zhou,

Yuejing Qi,

Mingyi Yao

et al.

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Simulation study on the robustness of polar mark for incident light polarization states

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References 5 publications

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