Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

Fan, Lei; Li, Xiaoping; Liu, Donglin; Liu, Yanming; Zhang, Shun

doi:10.1063/1.5118911

Cited by 12 publications

(6 citation statements)

References 17 publications

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“…And the maximum electron number density differs by more than 10 times, which is consistent with the conclusion drawn under the inductively coupled plasma (ICP) discharge mode. [27] In addition, although the electron number density of helium is lower than that of argon, the uniform range of plasma in the central region is larger than the case of argon discharge. The reason is that the degree of ionization of argon gas is higher than that of helium gas.…”

Section: Plasma Characteristics Under Different Discharge Gases and P...mentioning

confidence: 99%

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma*

Ouyang¹,

Liu²,

Jin³

et al. 2021

Chinese Phys. B

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A one-dimensional self-consistent calculation model of capacitively coupled plasma (CCP) discharge and electromagnetic wave propagation is developed to solve the plasma characteristics and electromagnetic wave transmission attenuation. Numerical simulation results show that the peak electron number density of argon is about 12 times higher than that of helium, and that the electron number density increases with the augment of pressure, radio frequency (RF) power, and RF frequency. However, the electron number density first increases and then decreases as the discharge gap increases. The transmission attenuation of electromagnetic wave in argon discharge plasma is 8.5-dB higher than that of helium. At the same time, the transmission attenuation increases with the augment of the RF power and RF frequency, but it does not increase or decrease monotonically with the increase of gas pressure and discharge gap. The electromagnetic wave absorption frequency band of the argon discharge plasma under the optimal parameters in this paper can reach the Ku band. It is concluded that the argon CCP discharge under the optimal discharge parameters has great potential applications in plasma stealth.

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Section: Plasma Characteristics Under Different Discharge Gases and P...mentioning

confidence: 99%

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma*

Ouyang¹,

Liu²,

Jin³

et al. 2021

Chinese Phys. B

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“…Asymptotic solutions up to second order for the flat parallel electrodes geometry for electron, ion and potential n (1) e (x) = (a − x)(a + x − 2) 2 , (A.1) n (2) e (x) = − 1 144(a − 1)β a − x a − 1β 2 (P e x(−2x 4 + 12x 3 − 18x 2 − 3x + 9) + 15γP i + a 3 (P e (5x 2 + 42x − 27) − 150γP i ) + a 5 (2P e − 15γP i ) + a 4 (P e (3 − 13x) + 75γP i ) − a(P e (2x 4 + 12x 3 − 63x 2 + 30x + 9) + 75γP i )…”

Section: Appendix Amentioning

confidence: 99%

“…Electric gas discharges are carried out in many applications of industry and science. Glow discharge plasmas are considered cold even when they reach a mean temperature of approximately 11,600 K. Many weakly ionized laboratory plasmas are classified as low temperature plasmas [1,2]. Some of the most well-known technological applications that use cold plasmas are fluorescent luminaries (neon, mercury, etc.).…”

Section: Introductionmentioning

confidence: 99%

“…It is well known that all available computational methods allow to consider diverse phenomena as, for instance, particle collisions and interactions, excitation, and recombination. Additionally, the use of numerical tools enables a proper handling of non-linearities, resulting in a more complete characterization of plasma dynamics [1]. Nevertheless, the theoretical problem of predicting plasma physics is not only reduced to the use of numerical tools, but can be addressed via analytical methods, whose capability to represent the physics of cold plasmas is highly appreciated in literature.…”

Section: Introductionmentioning

confidence: 99%

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Asymptotic solutions for a continuum model of a DC gas discharge incavities with different geometry

et al. 2022

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Analytical solutions for a continuum model of a DC gas discharge were obtained by asymptotic approximations. The solutions are one-dimensional and stationary. Three different cavity configurations of electrode pairs were considered, namely, parallel flat plates, concentric cylinders and concentric spheres. The asymptotic approximations consider nonlinear effects that are present in the dynamics of the plasma which are neglected in most of analytical solutions found in the literature. The obtained solutions determine the distribution of positively and negatively charged particles, as well as the electric potential along the space domain. Analytical results agree quantitatively with results from a spectral numerical solution developed for validation purposes. Such agreement was possible in a regime where the rate of charged particle production was assumed to be very small. Finally the limits of this regime are reported.

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“…To explain this phenomenon, a new equation for the average electron energy was proposed. Lei et al [19] employed the COMSOL software to simulate the ICP discharge and studied the influences of different coil designs and gas compositions on the discharge characteristics of a twodimensional ICP. The best discharge characteristic is considered to be afforded by a 20-mm coil gap, with the first coil positioned 130 mm away from the top of the device, and the best discharge mode is considered to be argon discharge mode.…”

Section: Introductionmentioning

confidence: 99%

Numerical simulation and experimental validation of multiphysics field coupling mechanisms for a high power ICP wind tunnel*

Yu¹,

Wang²,

Qiu³

et al. 2021

Chinese Phys. B

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We take the established inductively coupled plasma (ICP) wind tunnel as a research object to investigate the thermal protection system of re-entry vehicles. A 1.2-MW high power ICP wind tunnel is studied through numerical simulation and experimental validation. The distribution characteristics and interaction mechanism of the flow field and electromagnetic field of the ICP wind tunnel are investigated using the multi-field coupling method of flow, electromagnetic, chemical, and thermodynamic field. The accuracy of the numerical simulation is validated by comparing the experimental results with the simulation results. Thereafter, the wind tunnel pressure, air velocity, electron density, Joule heating rate, Lorentz force, and electric field intensity obtained using the simulation are analyzed and discussed. The results indicate that for the 1.2-MW ICP wind tunnel, the maximum values of temperature, pressure, electron number density, and other parameters are observed during coil heating. The influence of the radial Lorentz force on the momentum transfer is stronger than that of the axial Lorentz force. The electron number density at the central axis and the amplitude and position of the Joule heating rate are affected by the radial Lorentz force. Moreover, the plasma in the wind tunnel is constantly in the subsonic flow state, and a strong eddy flow is easily generated at the inlet of the wind tunnel.

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Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

Cited by 12 publications

References 17 publications

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma*

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma*

Asymptotic solutions for a continuum model of a DC gas discharge incavities with different geometry

Numerical simulation and experimental validation of multiphysics field coupling mechanisms for a high power ICP wind tunnel*

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