Simulation Results of Uniaxial Micromirrors with Conic-Backside and V-Arm Flexures for Scanner and Display Applications

Sun, Weiwei; Zhan, Shaodong; Qiu, Yihang; Hu, Jianmin; Zhang, Guanglie

doi:10.1109/cyber.2018.8688234

2018 IEEE 8th Annual International Conference on CYBER Technology in Automation, Control, and Intelligent Systems (CYBER) 2018

DOI: 10.1109/cyber.2018.8688234

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Simulation Results of Uniaxial Micromirrors with Conic-Backside and V-Arm Flexures for Scanner and Display Applications

Weiwei Sun

Shaodong Zhan

Yihang Qiu

et al.

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Simulation Results of Uniaxial Micromirrors with Conic-Backside and V-Arm Flexures for Scanner and Display Applications

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