Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding

Ogiwara, Kohei; Chen, Weiting; Uchino, Kenji; Kawai, Yoshinobu

doi:10.1016/j.tsf.2013.04.054

Cited by 9 publications

(16 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Equations ( 1) and ( 2) suggest that the electron density is considered to be maximum at a certain pressure although the electron density is determined by solving the particle and power balance equations. 10) Recently, the above tendency has been found in simulations 11) as well as experiments. 12) Equation (1) indicates that E 0 and ν m as well as ω are important parameters for a VHF plasma, that is, the VHF power and pressure are key parameters in relation to VHF plasma characteristics.…”

Section: Introductionmentioning

confidence: 69%

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Lien

Chen

Yang

et al. 2015

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

A capacitively coupled VHF H 2 plasma (60 MHz) was produced at high pressures, and plasma parameters were examined as a function of pressure and power at different discharge gaps (10, 15, and 20 mm). Here, a balanced power feeding method was adopted to avoid anomalous discharges. It was found that the electron density peaked at a certain pressure. As the discharge gap decreased, the peak pressure increased. The electron temperatures at the discharge gaps of 10 and 20 mm were approximately 8 and 3 eV at high pressures, respectively. In addition, we found that the sheath potential corresponding to the ion bombardment energy with the discharge gap of 10 mm was lower than the theoretical value calculated on the basis of the sheath theory, suggesting the existence of negative ions. Estimation of negative ion concentration was attempted on the basis of the sheath theory taking into consideration negative ions.

show abstract

Section: Introductionmentioning

confidence: 69%

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Lien

Chen

Yang

et al. 2015

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

show abstract

“…As is well known, the cross-section of H À ions is smaller than those of other ion species, so they have not been observed with the QMS in most of the experiments. Recently, it was reported by simulation that the density of H À of a VHF H2 plasma is very low [16]. However, Kalache et al [12] reported that when the vibration temperature was high, the cross-section of H À ions increased and, as a result, the H À ion density increased.…”

Section: Resultsmentioning

confidence: 98%

Production of a uniform VHF H2 plasma by a narrow-gap discharge

Lien

Chen

Yang

et al. 2015

Vacuum

Self Cite

View full text Add to dashboard Cite

“…In our study, we have simulated a BPF hydrogen plasma in a cylindrical chamber where the calculation area outside the electrodes is very large compared with that inside the electrodes. 21,22) It was confirmed that the BPF method reduced the electron density outside the electrodes and increased that inside the electrodes. In addition, we found that the discharge outside the electrodes decreased with high pressure in the BPF model.…”

Section: Introductionmentioning

confidence: 86%

Simulation of balanced power feeding plasma surrounded by a metal box

Ogiwara

Chen

Uchino

et al. 2014

Jpn. J. Appl. Phys.

Self Cite

View full text Add to dashboard Cite

The characteristics of a balanced power feeding VHF plasma was examined by two-dimensional simulation in which a pair of parallel disc discharge electrodes was surrounded by a metal box. The simulation results indicated that charged particles were generated between the discharge electrodes and diffused outside the electrodes. It was found that the discharge outside the electrodes was suppressed by shortening the distance between the electrode and the metal box, and that the discharge state between the electrodes was completely independent of that distance. The discharge with bare metal electrodes provided a lower electron density outside the electrodes than that with electrodes whose outer surfaces were covered by insulators.

show abstract

Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding

Cited by 9 publications

References 13 publications

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Production of a uniform VHF H2 plasma by a narrow-gap discharge

Simulation of balanced power feeding plasma surrounded by a metal box

Contact Info

Product

Resources

About

Simulation of spatial characteristics of very high frequency hydrogen plasma produced by a balanced power feeding

Cited by 9 publications

References 13 publications

Characteristics of a VHF H2plasma at high pressures for different discharge gaps

Characteristics of a VHF H2plasma at high pressures for different discharge gaps

Production of a uniform VHF H2 plasma by a narrow-gap discharge

Simulation of balanced power feeding plasma surrounded by a metal box

Contact Info

Product

Resources

About

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps

Characteristics of a VHF H₂plasma at high pressures for different discharge gaps