2006 IEEE International Conference on Semiconductor Electronics 2006
DOI: 10.1109/smelec.2006.381070
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Simulation of Piezo-Resistive Metal Gauge on Rectangular Membrane for Low Pressure Application

Abstract: Piezo-resistive metal gauge on rectangular membrane design and its simulation for low pressure application is presented in this paper. Small deflection analytical equations are derived for both simply supported and clamped edge boundary conditions. The design and orientation of grid pattern on rectangular membrane is based on ANSYS simulation results. It is used to find out maximum strain locations to achieve high sensitivity. Maximum of 0.3509 micro strain and maximum resistance change in grid = 90.6271 micro… Show more

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“…area within the whole length to attain the maximum tenderness. Materials such as aluminium, polystyrene, silicon, and polyimide are utilized as substrates for the design of the strain gauge (Hamid et al, 2006;Thangamani et al, 2008;Yang & Lu, 2013). Lightweight aluminium is capable of exerting the greatest strain and is suitable for use within a temperature range of -195 ˚C to +400 ˚C, and therefore, in this particular study, it was selected as a substrate for the pattern assessment.…”
Section: Scientific Journal For the Faculty Of Science-sirte University (Sjfssu)mentioning
confidence: 99%
“…area within the whole length to attain the maximum tenderness. Materials such as aluminium, polystyrene, silicon, and polyimide are utilized as substrates for the design of the strain gauge (Hamid et al, 2006;Thangamani et al, 2008;Yang & Lu, 2013). Lightweight aluminium is capable of exerting the greatest strain and is suitable for use within a temperature range of -195 ˚C to +400 ˚C, and therefore, in this particular study, it was selected as a substrate for the pattern assessment.…”
Section: Scientific Journal For the Faculty Of Science-sirte University (Sjfssu)mentioning
confidence: 99%
“…The idea enables the specified alignment to be determined in addition to the active area within the whole length to attain the maximum tenderness. Materials such as aluminium, polystyrene, silicon, and polyimide are utilized as substrates for the design of the strain gauge (Hamid et al, 2006;Thangamani et al, 2008;Yang & Lu, 2013). Lightweight aluminium is capable of exerting the greatest strain and is suitable for use within a temperature range of -195 ˚C to +400 ˚C, and therefore, in this particular study, it was selected as a substrate for the pattern assessment.…”
Section: Introductionmentioning
confidence: 99%