Simulation of microfluid systems

Zengerle, Roland; Richter, M.

doi:10.1088/0960-1317/4/4/004

Cited by 82 publications

(57 citation statements)

References 7 publications

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“…In addition, we present a lumpedparameter model to analyze the operation of the peristaltic pump. With the model, the dynamics of peristaltic pumping, not addressed by existing micro pump models, [8][9][10] are appropriately investigated. We consider the dynamics of individual pumping chambers and account for the interactions of such component dynamics by a system representation of the peristaltic pump.…”

Section: Introductionmentioning

confidence: 99%

Surface micromachined electrostatically actuated micro peristaltic pump

et al. 2004

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An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min 21 and an estimated pumping pressure of 1.6 kPa were achieved at 20 Hz phase frequency. A dynamic analysis was also performed with a lumpedparameter model for the peristaltic pump. The analysis results allow a quantitative understanding of the peristaltic pumping operation, and correctly predict the trends exhibited by the experimental data. The small footprint of the micro pump is well suited for large-scale integration of microfluidics. Moreover, because the same platform technology has also been used to fabricate other devices (e.g. valves, electrospray ionization nozzles, filters and flow sensors), the integration of these different devices can potentially lead to versatile and functional micro total analysis systems (mTAS).

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Section: Introductionmentioning

confidence: 99%

Surface micromachined electrostatically actuated micro peristaltic pump

et al. 2004

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“…Zengerle and Richter have shown that for incompressible fluids elastic elements of a micropump are characterized by their pressure dependent volume deformation, called the fluid capacitance, and defined in formula (2): with being the fluid density [1]. Therefore, elasticity is modeled as an electrical capacitance.…”

Section: Elasticity Of Structural Elementsmentioning

confidence: 99%

“…Zengerle and Richter have shown in 1994 that micropumps could be modeled using the equivalence between fluidic systems and electrical networks [1]. Bourouina et al have verified and used this method to design a micropump for medical application [2,3].…”

Section: Introductionmentioning

confidence: 99%

Modeling of a Piezoelectric MEMS Micropump Dedicated to Insulin Delivery and Experimental Validation Using Integrated Pressure Sensors: Application to Partial Occlusion Management

Fournier

Chappel

2017

Journal of Sensors

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A numerical model based on equivalent electrical networks has been built to simulate the dynamic behavior of a positivedisplacement MEMS micropump dedicated to insulin delivery. This device comprises a reservoir in direct communication with the inlet check valve, a pumping membrane actuated by a piezo actuator, two integrated piezoresistive pressure sensors, an antifree-flow check valve at the outlet, and finally a fluidic pathway up to the patient cannula. The pressure profiles delivered by the sensors are continuously analyzed during the therapy in order to detect failures like occlusion. The numerical modeling is a reliable way to better understand the behavior of the micropump in case of failure. The experimental pressure profiles measured during the actuation phase have been used to validate the numerical modeling. The effect of partial occlusion on the pressure profiles has been also simulated. Based on this analysis, a new management of partial occlusion for MEMS micropump is finally proposed.

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“…Both the electrodes can be fabricated using silicon technique and bonding of the two wafers with a predefined space for the two electrodes is possible [5,9].…”

Section: Mechanical Micropumpmentioning

confidence: 99%

“…Micropumps differ in actuation mechanism, valve mechanism and fabrication process. Pneumatic [5,9], thermopneumatic [5,10], piezoelectric [11,12,13,14], electrostatic [9], bimetallic [15], shape memory effect [16] and electrothermal [17] are some of the mechanical actuation techniques presented in past. In the nonmechanical actuation technique electrohydrodynamic [8], electroosmotic [8,18], ultrasonic [5,8], magnetohydrodynamic [19] are some of the actuation principles.…”

mentioning

confidence: 99%