Simulation of micro-cantilever based series switch and development of its ANN model

Abstract

This paper discusses few geometrical design issues to reduce the actuation voltage of series MEMS switch. It presents the design of RF-MEMS series cantilever based switch with pulldown electrodes using parallel capacitance between beam and pull down electrode. The switch structure is composed of aluminum material. Minimum actuation voltage achieved is 8 Volts. The simulation of the switch is carried out in CoventorWare a MEMS modeling and simulation software. An ANN model using the toolbox of MATLAB is developed using the results of simulation of designed switch in CoventorWare and it is also validated. This model can be used to take any required results quickly within the permissible range for the designed switch.