Simulation of gas damping in microstructures with nontrivial geometries

Mehner, Jan; Kurth, Steffen; Billep, Detlef; Kaufmann, Christian; Kehr, Kersten; Dötzel, Wolfram

doi:10.1109/memsys.1998.659749

Cited by 23 publications

(16 citation statements)

References 8 publications

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“…And the results of this model match the experimental data much better than those of Christian's model for a common rectangular plate. Many other authors have also analyzed the air damping in MEMS: squeeze-film damping behavior between plates [3] or perforated plates [4,5], gas damping of micromirrors [6,7], viscous damping of laterally oscillating microstructures [8,9], and air damping of flexible microbeams [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Air Damping Analysis in Comb Microaccelerometer

Zhou

Chen

Peng

et al. 2014

Advances in Mechanical Engineering

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Air damping significantly influences the dynamical characteristics of MEMS accelerometers. Its effects at micro-scale level sharply depend on the structure layouts and size of MEMS devices. The damping phenomenon of comb microaccelerometers is investigated. The air between fixed plate electrodes and movable plate electrodes cannot flow freely and is compressed. The air damping, therefore, exhibits both viscous effects and stiffness effects. The former generates a drag force like that in macromechanical systems, and the damping force is proportional to the velocity of movable electrodes. The latter stiffens the rigidity of structure, and the stiffening level is related to the gap value of capacitors, internal pressure, and temperature. This paper focuses on the dependence of the squeeze film air damping on capacitor gaps. The simulation and experiments indicate that the squeeze film effect is sharply affected by the gap value when the structural dimensions decrease. And the influence of fabrication errors is considered in damping design in comb microaccelerometers.

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Section: Introductionmentioning

confidence: 99%

Air Damping Analysis in Comb Microaccelerometer

Zhou

Chen

Peng

et al. 2014

Advances in Mechanical Engineering

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“…An analytical solution for the squeeze damping force F � (u) at master node j for perpendicular moving plates has been derived in [12] for small velocities it from the simplified approach of the linearized Reynolds equations which assumes small displacements u and small gaps compared to plate dimensions.…”

Section: Contact Phenomena At System Levelmentioning

confidence: 99%

Recent developments in reduced order modeling based on mode superposition technique

Kolchuzhin

Naumann

Mehner

2011

2011 12th Intl. Conf. On Thermal, Mechanical &Amp; Multi-Physics Simulation and Experiments in Microelectronics and Microsystem

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“…where 0 / h t w denotes the velocity of the sensitive proof mass in z-axis; h is the thickness of gas film; is the gas viscosity in sealed cavity when sensitive proof mass is moveless; LB s1 B is gas slip length at wall surface, 1 1 1…”

Section: A Modelingmentioning

confidence: 99%

Investigate on Characteristics of Gas Film Damping of Capacitive Micro Accelerometers

Wang

Jia

Zhang

2006

2006 6th World Congress on Intelligent Control and Automation

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Basing on the rarefied gas dynamics theory and the squeeze film Reynolds equation amended with slip flow boundary condition, the gas film damping effects on the sensitive proof mass, moving along its axial direction, are analyzed for capacitive micro accelerometers. Simplified analysis solutions are obtained for damping force and damping coefficient. Also it shows that gas film damping force is related not only to the accelerometer dimensions and velocity of proof mass, but also to the factors, such as solid wall material, surface roughness, smooth finish, and so on. Finally, it is shown that gas film damping, especially for squeezed-damping, is seriously influenced by Maxwell's reflection coefficient, which needs to be further investigated and analyzed.

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Simulation of gas damping in microstructures with nontrivial geometries

Cited by 23 publications

References 8 publications

Air Damping Analysis in Comb Microaccelerometer

Air Damping Analysis in Comb Microaccelerometer

Recent developments in reduced order modeling based on mode superposition technique

Investigate on Characteristics of Gas Film Damping of Capacitive Micro Accelerometers

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