Simulation of femtosecond laser ablation of silicon

Holenstein, Roman; Kirkwood, Sean E.; Fedosejevs, R.; Tsui, Ying Y.

doi:10.1117/12.567675

Cited by 9 publications

(10 citation statements)

References 24 publications

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“…Surface atoms were continually damped to 1200 K. In addition, the temperature evolution of the system was observed, and the continuous isotherms were obtained. Holenstein et al 17 concluded that the coupling mode was performed adequately and was more accurate than any other boundary condition for this application.…”

Section: Adams Velocity Algorithmmentioning

confidence: 89%

“…The coupling model was verified by Holenstein et al 17 via keeping a constant surface temperature. Surface atoms were continually damped to 1200 K. In addition, the temperature evolution of the system was observed, and the continuous isotherms were obtained.…”

Section: Adams Velocity Algorithmmentioning

confidence: 92%

“…15 The Stillinger-Weber (SW) potential 16 is used because of its moderate cutoff radius, less parameters and simple form. In addition, the parameters of SW potential are taken from Holenstein et al 17 to describe the interactions among the particles in this study. As shown in equation 2, the potential energy is given by…”

Section: Particle Interactionmentioning

confidence: 99%

“…The HF system in turn was connected to a heat bath set to 300 K, to simulate an infinite bulk medium. 17 The MD and HF systems were energetically coupled as illustrated in Figure 4. A section at the bottom of the MD system ($ 2:6 nm) overlaps with the top of the HF system.…”

Section: Adams Velocity Algorithmmentioning

confidence: 99%

“…In addition, the parameters of SW potential are taken from Holenstein et al. 17 to describe the interactions among the particles in this study. As shown in equation (2), the potential energy is given by

Figure 3.(a) Structure of Si(100) and (b) geometry of triplet of atoms used in definition of three-body potentials. …”

Section: Simulation Modelmentioning

confidence: 99%

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Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser

Zhou

Gong

Wan

et al. 2016

Proceedings of the Institution of Mechanical Engineers, Part E:

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Stillinger-Weber potential and Z-layer energy model were adopted in molecular dynamics simulation to study the ablation of silicon by water-jet-guided femtosecond laser, and comparison was made by ablating silicon with or without water-jet cooling in our simulations. Simulation results indicated that with water-jet cooling, the thermal-affected zone could be reduced in area, and the peak of density could disappear more quickly. It was therefore concluded that waterjet-guided laser could be used to considerably improve the ablation quality of silicon.

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Section: Adams Velocity Algorithmmentioning

confidence: 89%

Section: Adams Velocity Algorithmmentioning

confidence: 92%