Simulation of Erosion Rate Distribution on a Target used in a Magnetron Sputtering System.

Kobayashi, Tsukasa; Hosokawa, Naokichi; Itagaki, Katsunori; Uchiyama, Tomoo

doi:10.3131/jvsj.37.355

SHINKU

1994

DOI: 10.3131/jvsj.37.355

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Simulation of Erosion Rate Distribution on a Target used in a Magnetron Sputtering System.

Tsukasa Kobayashi

Naokichi Hosokawa

Katsunori Itagaki

et al.

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Simulation of Erosion Rate Distribution on a Target used in a Magnetron Sputtering System.

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