Simulation of dynamics-coupling in piezoelectric tube scanners by reduced order finite element analysis

Abstract

Piezoelectric tube scanners are widely used in scanning probe microscopes to position the sample or the probe. Fast and accurate scanning requires the suppression of dominant low-frequency resonances as well as the compensation of dynamics-coupling effects. The present article gives a detailed description of the fully coupled tube scanner dynamics over a wide frequency range modeled by finite element (FE) analysis using the commercially available software package ANSYS. The effect of a sample mass attached to the top of the tube is investigated by considering its added mass and local stiffening. A model order reduction scheme is applied to obtain a low order model that describes the lateral and vertical deflections as well as the voltage induced on quadrant electrodes. Comparison to experimental data demonstrates a good agreement for both the full FE model and reduced order model.

Bridging the gap between conventional and video-speed scanning probe microscopes

“…This resonance is due to the first lateral bending mode of the tube which is coupled into the vertical response [49]. As discussed in the introduction, the resonance at 680 Hz limits the vertical feedback bandwidth to only 120 Hz.…”

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

“…It generally exists in piezoscanners [51,72] used for 3D (X -Y -Z axes) nanopositioning in applications such as the AFM and produces a bowl-shaped image of a flat surface. It generally exists in piezoscanners [51,72] used for 3D (X -Y -Z axes) nanopositioning in applications such as the AFM and produces a bowl-shaped image of a flat surface.…”

Position Sensors for Nanopositioning

“…When mounted on a host structure, flexional sensors can be used to detect the underlying stress or strain as well as the curvature or moment [37,44,45]. In nanopositioning applications, the electrodes of a piezoelectric tube act as a plate sensor and can be used to detect the strain and hence displacement [39,40,42]. This application is illustrated in Fig.…”