Simulation of a large size inductively coupled plasma generator and comparison with experimental data

Lei, Fan; Li, Xiaoping; Liu, Yanming; Liu, Donglin; Yang, Min; Yu, Yuanyuan

doi:10.1063/1.5016354

Cited by 23 publications

(5 citation statements)

References 21 publications

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“…Plasma consist of the energetic electrons, neutral atoms, excited species, positive ions and negative ions, metastable atoms and free radicals. In its configuration, comsol physics provides modelling and analysis power [10][11][12] for different areas [10][11][12][13]. In addition, software package COMSOL also contains optional modules inside it.…”

Section: Resultsmentioning

confidence: 99%

InP based converter cells under DC plasma influence

KURT

2019

Journal of Energy Systems

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The plasma parameters have been determined in an infrared image converter for the InP based plasma cell in a broad range of gas pressure from 10 Torr to 760 Torr at room temperature. The electrical properties of the system are controlled by both the plasma and InP electrode. InP has high electron mobility compared to other semiconductors and it can be used for high-speed optoelectronic device applications. Further, any small change in the charge transport mechanism may cause important changes in the system characteristics. The experimental measurements are carried out in air and He media. The homogeneity of the discharge radiation emission depends on the resistivity distribution of the photodetector plate and the radiation intensity is proportional to the plasma current. Local changes in the resistivity of the semiconductor result in local changes in the current and plasma emission.

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Section: Resultsmentioning

confidence: 99%

InP based converter cells under DC plasma influence

KURT

2019

Journal of Energy Systems

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“…This can be used for physical etching of the target material. One must consider here that in gasification, a rise in temperature is necessary; therefore, the ICP is more suitable in this case [154]. If it is an ICP, RF plasmas are operated without the use of an electrode, and hence do not suffer the disadvantage of generating impurities-the caveat being that they are less efficient compared to DC plasma, generating only a few hundred kilowatts [81,135].…”

Section: Plasma Gasificationmentioning

confidence: 99%

Applications of Plasma Technologies in Recycling Processes

Kusano,

Kusano

2024

Materials

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Plasmas are reactive ionised gases, which enable the creation of unique reaction fields. This allows plasmas to be widely used for a variety of chemical processes for materials, recycling among others. Because of the increase in urgency to find more sustainable methods of waste management, plasmas have been enthusiastically applied to recycling processes. This review presents recent developments of plasma technologies for recycling linked to economical models of circular economy and waste management hierarchies, exemplifying the thermal decomposition of organic components or substances, the recovery of inorganic materials like metals, the treatment of paper, wind turbine waste, and electronic waste. It is discovered that thermal plasmas are most applicable to thermal processes, whereas nonthermal plasmas are often applied in different contexts which utilise their chemical selectivity. Most applications of plasmas in recycling are successful, but there is room for advancements in applications. Additionally, further perspectives are discussed.

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“…Consequently, to simulate plasma diffusion processes, it is necessary to master the basic principles and laws of plasma discharge. The plasma generated by discharge includes DC discharge [15][16][17], RF discharge [18][19][20], and microwave discharge. During plasma discharge, neutral gas molecules are bombarded by electrons moving at a high speed in an electric field, forming more electrons and positively charged particles.…”

Section: Introductionmentioning

confidence: 99%

Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge

Zhang¹,

Wang²,

Shao³

et al. 2023

Phys. Scr.

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The formation and diffusion of plasma are complex and critical processes in plasma nitriding. A stable and high-concentration plasma atmosphere can effectively increase the diffusion rate and the thickness of the diffusion layer. In this study, a two-dimensional multi-physics model integrating physical kinetics, energy transfer, mass transfer, and electromagnetic induction was developed. The effect of a hollow-cathode structure on plasma distribution was investigated, and the edge effect observed on nitrided metals was eliminated. The impacts of the essential plasma diffusion parameters were simulated using the developed model. A simple but effective experiment was designed to validate the model. A diffusion furnace with DC and RF dual discharge was designed by adding a high-frequency coil to existing equipment. Subsequently, the effects of the two plasma excitation sources on the overall distribution of plasma were analyzed. Notably, the proposed model is a high-fidelity one based on actual device dimensions; therefore, it can be used to simulate, predict, and control the plasma formation process in the diffusion furnace. In addition, the model can provide reference data and guidance for optimizing the diffusion process and structural design of diffusion furnaces.

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Simulation of a large size inductively coupled plasma generator and comparison with experimental data

Cited by 23 publications

References 21 publications

InP based converter cells under DC plasma influence

InP based converter cells under DC plasma influence

Applications of Plasma Technologies in Recycling Processes

Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge

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