Simulation model for micromechanical angular rate sensor

Veijola, Timo; Kuisma, Heikki; Lahdenpera, J.; Ryhänen, Tapani

doi:10.1016/s0924-4247(97)01382-4

Cited by 15 publications

(9 citation statements)

References 7 publications

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“…In consequence, Mathematica Ó was used to generate, from the list of simulated FEA points, an equivalent lumped-component representation of the squeeze-film damping behavior, which can be directly mapped into a Spice-like macro model, useful for both time-and frequency-based analysis. The generation procedure combines the FEA data with the theoretical insight given by the analytical theory of squeeze-film damping (Veijola et al 1997;Bao et al 2007;Rocha 2005).…”

Section: System Level Noise Analysismentioning

confidence: 99%

“…Frequency-dependent damping behavior is well analyzed in several papers (Cercignani et al 1963;Veijola et al 1997;Veijola 2006;Bao et al 2007), where the physical phenomena related to the gas flow between parallel plates are analyzed and corresponding compact analytical are derived. Nevertheless, to the best of our knowledge, there are no papers analyzing the impact of these damping models on the mechano-thermal noise.…”

Section: Introduction (State Of the Art)mentioning

confidence: 99%

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Frequency-dependent noise analysis and damping in MEMS

Sharma

Cretu

2009

Microsyst Technol

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The paper presents a combined noise and damping analysis for MEMS structures, based on frequency-dependent behavioral models extracted from finite element simulations. The design of high sensitivity MEMSbased microsystems needs to consider the frequency noise shaping induced by damping phenomena on micro scale motion, for its contribution can be significant in the system level noise analysis. Frequency-dependent behavioral models for squeeze-film damping are generated from finite element analysis simulations. Unlike existing noise analysis reported in literature, based on frequency-independent damping assumption, the paper integrates the damping and noise aspects using the same frequency-dependent models. The results can be used for a noise-based optimization procedure applied to the design of resonating microsensors, as illustrated for the case of a MEMS-based gyroscope.

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Section: System Level Noise Analysismentioning

confidence: 99%

Section: Introduction (State Of the Art)mentioning

confidence: 99%

Frequency-dependent noise analysis and damping in MEMS

Sharma

Cretu

2009

Microsyst Technol

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“…The simulation model should help in the design of such a critical device. The model of a vibrating gyroscope based on a dual torsional mass system has been implemented in the circuit simulation program APLAC [6].…”

Section: Received 6 August 2003mentioning

confidence: 99%

System-level simulation of vibratory micromachined gyroscope with fence structure

2004

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An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is modeled by electrical equivalent circuits according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis such as oscillating~s transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system. Behavioral simulation of the system is performed to prove the function of detection circuits. The simulation results and measurement results show that the design of circuits is feasible.

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“…Fedder et al otherwise, devoted more efforts to the design hierarchy and circuit-based macromodeling approach and tools (Fedder 1999(Fedder , 2005Mukherjee et al 2000), which are special useful for the simulation of complicated systems containing micro devices and associated circuitry, and the same strategy is just used for the modeling of our prototype in this paper. To perform a system-level simulation, two representations are usually used to describe the macromodels with analytical expressions (ODEs generally): one is based on the analog hardware description language (AHDL), supported by VHDL-AMS or Verilog-AMS, and the other is the equivalent electrical network or circuit representation (Senturia 1998;Jakovljevic et al 2002;Tilmans 1996;Mukher 2000;Bourouina et al 1996;Veijola et al 1997;Endemañ o et al 2002;Zhou et al 2002). Relative to AHDL description, forming the equivalent circuits is always difficult and more skills may be needed.…”

Section: Introductionmentioning

confidence: 99%

System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation

Wang

Chen

2007

Microsyst Technol

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A rapid and accurate system-level modeling and simulation for a novel electrostatic-feedback microaccelerometer, based on equivalent networks and electrical analogies, are presented in this paper. With the employment of the structured design strategy, the system is hierarchically decomposed at first, and the macromodel of the elementary transducer (a variable capacitor), is accordingly generated using the nodal analysis method, with the form of matrix or network. Based on this, the two types of differential capacitors, which respectively serve as sense and feedback elements, are mainly discussed and modeled. Expressed as equivalent circuits, they are coupled with the outside components, constructing an equivalent electrical representation that describes the completed mixed-domain system. The validity of the proposed model is verified by a good agreement between the simulation results implemented in the electrical simulator, OrCAD/Pspice, and those from VHDL-AMS approach. Then, some dynamic characteristics of the system are discussed. This computational prototyping provides a valuable foundation for further predictable optimal design for the product, with great benefit in reducing the costs and improving the effectiveness.

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Simulation model for micromechanical angular rate sensor

Cited by 15 publications

References 7 publications

Frequency-dependent noise analysis and damping in MEMS

Frequency-dependent noise analysis and damping in MEMS

System-level simulation of vibratory micromachined gyroscope with fence structure

System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation

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