Simulation, Making and Testing of the Actuator of Precise Positioning Based on the Bimorph Plate of Lithium Niobate

Lithium Niobate Piezoelectric Actuator-Integrated Fiber Fabry-Pérot Tunable Filter with Ultrahigh Speed and Linearity

“…LiNbO 3 is a promising material with excellent piezoelectric properties, such as a large electromechanical coupling coefficient, high Curie temperature, low hysteresis, and creep. , Several studies have investigated LiNbO 3 piezoelectric devices, such as ultrasonic transducers − and photoelastic modulators . However, owing to difficulties in assembly and processing, − LiNbO 3 has never been integrated as a displacement actuator in compact and integrated all-fiber devices.…”

Determination of optimal crystallographic orientations for LiNbO<sub>3</sub> and LiTaO<sub>3</sub> bimorph actuators

“…More than 30 years of investigations have proven the use of LiNbO 3 -based actuators (Nakamura et al, 1989(Nakamura et al, , 1995Ueda et al, 1990;Wakatsuki et al, 1998;Randles et al, 2006;Kawamata et al, 2007;Antipov et al, 2008;Matsunami et al, 2008;Bykov et al, 2014;Shur et al, 2015;Kubasov et al, 2016;Turutin et al, 2018;Buryy et al, 2019;Jiang et al, 2020), in particular in medicine (Randles et al, 2006). The active elements of LiNbO 3 -based actuators could be manufactured in the form of bimorph crystalline plates (Nakamura et al, 1989(Nakamura et al, , 1995Ueda et al, 1990;Kawamata et al, 2007;Antipov et al, 2008;Bykov et al, 2014;Shur et al, 2015;Kubasov et al, 2016;Turutin et al, 2018;Buryy et al, 2019), multi-layer structures (Matsunami et al, 2008) and thin films (Jiang et al, 2020). These crystals possess many advantages compared to PZT, namely, higher Curie temperature, the virtual absence of hysteresis and creep, and weak dependences of the piezoelectric constants on temperature (Antipov et al, 2008;Shur et al, 2015).…”

“…In other words, such a configuration is a bidomain structure, which functions in accordance with the bimorph principle: applying a voltage leads simultaneously to the expansion of one layer and compression of the other layer; as the result, the element bends (Shur et al, 2015). Lithium niobate bimorph plates can be manufactured by a few techniques, i.e., by the thermochemical formation of the so-called inverse layer on a surface of a single-domain LiNbO 3 plate (Nakamura et al, 1989), by the electro-thermal method, particularly during infrared heating (Antipov et al, 2008;Bykov et al, 2014), and by direct bonding of high-quality polished and cleaned plates (Shur et al, 2015). We have manufactured such a bimorph structure using two lithium niobate plates bonded by means of diffusion, using copper from films deposited on the surfaces of the plates as a diffusant (Buryy et al, 2019).…”

Comparative Investigations of Nanohardness and Impurity Distribution Profiles of Lithium Niobate Single Crystals Diffusion Doped by Copper Ions

“…Diffusion is one of the technological methods used in functional electronics for bonding of crystal‐based elements . It has been recently shown that the single domain LN surfaces, which have an electrical charge of the same sign (in other words, spontaneous polarization vectors are anti‐parallel in these surfaces) can be bonded through the interdiffusion of copper film, deposited on one of the surfaces . Such structures can be used, for example, as active elements of precise positioning piezoelectric actuators .…”

“…Such structures can be used, for example, as active elements of precise positioning piezoelectric actuators . The diffusion coefficients of copper ions in LN are relatively high (e.g., 500 times higher compared to iron ions), and the required annealing temperatures are relatively low (up to 800 °C), which makes this material an attractive diffuser. However, the changes of mechanical properties of diffusion‐modified layers depending on the diffusion depth remain unexplored, although this knowledge is important, in particular for the analysis of actuators.…”