2015
DOI: 10.1117/12.2191693
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Simulation in thin film technology

Abstract: Braunschweig, Germany ABSTRACTSimulation and modeling find more and more their way into thin film technology. Beside theoretical models for layer design, pre-production design analysis, and real time process control, atomistic simulation techniques gain of importance. Here, especially classical procedures such as Direct Simulation and Particle-in-Cell Monte Carlo (DSMC/PIC-MC), kinetic Monte Carlo (kMC) and Molecular Dynamics (MD) as well as quantum mechanical techniques based on Density Functional Theory (DFT… Show more

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Cited by 11 publications
(7 citation statements)
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“…Badorreck et al [6] investigated GLAD coatings of TiO 2 with regard to the birefringence properties. However, the former performed simulations with deposition under 0 • , 30 • , 50 • and 70 • exhibit a small size in lateral dimension of 7 × 8 nm 2 ; therefore, here the results will be compared to structures grown on a substrate area of 30 × 20 nm 2 . In addition, the impact of using different interaction potentials will be analyzed here, namely the potentials from Matsui et al [9] and Zhang et al [10].…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Badorreck et al [6] investigated GLAD coatings of TiO 2 with regard to the birefringence properties. However, the former performed simulations with deposition under 0 • , 30 • , 50 • and 70 • exhibit a small size in lateral dimension of 7 × 8 nm 2 ; therefore, here the results will be compared to structures grown on a substrate area of 30 × 20 nm 2 . In addition, the impact of using different interaction potentials will be analyzed here, namely the potentials from Matsui et al [9] and Zhang et al [10].…”
Section: Methodsmentioning
confidence: 99%
“…However, the computation of the deposition of thin films is a challenge, because for a concise model several orders of magnitude in space and time have to be covered by a multi-scale model. As described in [1][2][3], this involves several models from direct simulation Monte Carlo (DSMC), to atomistic models like molecular dynamics (MD) or kinetic Monte Carlo (kMC), to quantum mechanical density functional theory (DFT) calculations. Within the framework of the theoretical description, the complete virtualization of the coating process place enormous demands on both the computational technology and the numerical procedures.…”
Section: Introductionmentioning
confidence: 99%
“…The next study conducted by the same author focused on the simulation of thin-film technology for TiO 2 [ 24 ]. The paper introduced an extension to the virtual quoted concept, wherein the determined optical properties are linked with rare acquisition models.…”
Section: Modeling Techniquesmentioning
confidence: 99%
“…8 At the same time, computational methods have been developed, enabling researchers to handle hundreds of molecules and, hence, to model organic films. 14…”
Section: Introductionmentioning
confidence: 99%