Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Abstract

Focused electron beam induced deposition (FEBID) is one of the few techniques that enables direct-write synthesis of free-standing 3D nanostructures. While the fabrication of simple architectures such as vertical or curving nanowires has been achieved by simple trial and error, processing complex 3D structures is not tractable with this approach. In part, this is due to the dynamic interplay between electron-solid interactions and the transient spatial distribution of absorbed precursor molecules on the solid surface. Here, we demonstrate the ability to controllably deposit 3D lattice structures at the micro/nanoscale, which have received recent interest owing to superior mechanical and optical properties. A hybrid Monte Carlo-continuum simulation is briefly overviewed, and subsequently FEBID experiments and simulations are directly compared. Finally, a 3D computer-aided design (CAD) program is introduced, which generates the beam parameters necessary for FEBID by both simulation and experiment. Using this approach, we demonstrate the fabrication of various 3D lattice structures using Pt-, Au-, and W-based precursors.

Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies

“…Even relatively simple 3D structures, such as spirals ( Figure 3A), require extensive process optimization. Nonetheless, improved understanding of the processes and numerical simulations has recently enabled reliable and fully 3D structuring by FEBIE [72]. The developed simulations take into account distribution of the precursor as well as electron interaction profiles to predict the growth of complex 3D objects, for example, a cubic frame or a buckyball ( Figures 3B and C, respectively).…”

“…Recently, the availability of multi-species ion sources [81], which can select particular single or double ionized Si or Au, opened new possibilities in the field of nano-fabrication [82]. At the same acceleration voltage, ~35 keV milling rate is proportional to the atomic mass; hence, milling rate [71], (B) a cubic frame, and (C) a buckyball [72]. Reprinted with permission from Ref.…”

“…Reprinted with permission from Ref. [71] and [72]. Copyright 2013 Macmillan Publishers Ltd, 2016 American Chemical Society.…”

3D Nanostructures Grown via Focused Helium Ion Beam Induced Deposition

“…Focused ion beam induced deposition (FIBID), uses an organometallic precursor gas in a field ion microscope to fabricate nanoscale structures with high-precision, and smaller critical dimensions than current offerings by the focused electron induced deposition (FEBID), or traditional liquid metal source FIBID. [1][2][3][4] In this work, we explore the mechanisms behind the competition of material deposition and sputtering during the 3D FIBID process in a Helium Ion Microscope (HIM), via controlled experiments and Monte Carlo simulations.[5] We provide a diagrammatic road-map for synthesis of 3D structures with highly specified geometries, as well as discuss the interplay between key parameters that affect the final product.The benefits of FIBID with helium ion microscopy are in the small feature size, as well as the ability to grow 3D structures on non-conductive substrates, such as SiO2 for semiconductor manufacturing or polymer substrates for flexible electronics, Figure 1(a, b). Since helium ions are positive, charge compensation can be easily afforded by using a generic electron flood gun.…”

Multifurcation Assembly of Charged Aerosols and Its Application to 3D Structured Gas Sensors

“…[6,7] 3D micro-/nanostructures could provide a new platform for various novel devices including sensors, solar and fuel cells, [8,9] and nanoelectronic devices. For this, the nanocomponents including organic, [10] inorganic, [11] and biomolecule [12,13] materials have been assembled by bottom-up methods utilizing electric fields, [14,15] magnetic fields, [16] flow fields, [17] and even functional surfaces, [18] which have advantages over serial approaches such as electron-beam lithography, [19] direct laser writing, [20] and dip-pen lithography. [21] Recently, responsive 3D microstructures have been manufactured by using virus building blocks, [12] and electrodynamic focusing of charged aerosols was also developed for the building of 3D nanoparticle structures.…”