Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Li, Ting; Shang, Haiping; Wang, Weibing

doi:10.3390/s20164419

Cited by 8 publications

(5 citation statements)

References 18 publications

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“…As a result, the piezoresistive coefficient is lower than its default value, thus reducing the practical output voltage. In addition, the effect of P-type heavily doped regions on sensitivity is ignored in the simulation process [27].…”

Section: Resultsmentioning

confidence: 99%

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A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design

Tang¹,

Li²,

Shang³

et al. 2022

J. Micromech. Microeng.

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Sensitivity and nonlinearity are two of the most basic and important properties of microelectromechanical systems (MEMS) piezoresistive pressure sensors. In this paper, we proposed a simple method to enhance sensor performance by changing the diaphragm size, which can improve both sensitivity and linearity. To obtain close sensitivity for different diaphragms, we first fixed the ratio of the edge length to the thickness of the diaphragm. Then, the relationship between sensitivity, linearity, and diaphragm size was established by calculation, and the simulation was carried out using ANSYS. We found that both sensitivity and linearity increased with an increase in the diaphragm side length. In addition, we designed and fabricated two pressure sensors with square diaphragms in the range of 30 MPa. They have the same length-to-thickness ratio of 3.33, and the edge lengths of the diaphragms are 346 μm and 599 μm, respectively. The test results showed that the device with a larger edge length had higher sensitivity and lower nonlinearity, which is consistent with the conclusion above. Therefore, increasing the diaphragm size may be an easy and practical way to improve the performance of the pressure sensors.

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Section: Resultsmentioning

confidence: 99%

“…Furthermore, the nonlinear error of the experiment is larger than the simulation result. The reasons may include residual stress introduced by the passivation film, nonuniform doping, and etching deviation during the process and nonlinearity introduced in the packaging process [27,29,30].…”

Section: Resultsmentioning

confidence: 99%

A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design

Tang¹,

Li²,

Shang³

et al. 2022

J. Micromech. Microeng.

Self Cite

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“…Nonlinearity error: defined as maximum deviation output signal from an assumed straight line over full span of sensor pressure range. The nonlinearity percentage is defined by the following equation [81]:…”

Section: Sensor Calibrationmentioning

confidence: 99%

Development of IOT-based low-cost MEMS pressure sensor for groundwater level monitoring

Barzegar

Blanks²,

Gharehdash

et al. 2023

Meas. Sci. Technol.

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Groundwater level monitoring is critical to protect and manage of groundwater resources. A properly designed and executed instrumentation can play important role to increase the quality and reliability of collected data and reducing total monitoring costs. The efficiency of the instrumentation is mainly depending on the accuracy and reliability of the installed sensors. This study presents, the testing and application of a cost-effective pressure sensor (0-689 kPa) range) for water level monitoring based on microelectromechanical system (MEMS) technology and Internet of things (IOT) concept. The sensor performance in term of accuracy, precision, repeatability, temperature was investigated in laboratory columns (with constant water level, increasing and decreasing water levels at various rates) and in-situ conditions in an observation bore (with natural groundwater level fluctuations). The results shows that the MEMS sensor capable of providing reliable and adequate monitoring scheme with an accuracy of 0.31% full scale (FS) (2.13 kPa).

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“…Usually, the stress difference ( σ l − σ t ) of each piezoresistor is same in amplitude and may be opposite in sign. When triggered by a pressure load P , the measurement sensitivity SEN of the whole bridge circuit can be expressed as [ 20 , 21 ]

…”

Section: Fundamentals For Piezoresistive Micropressure Sensorsmentioning

confidence: 99%

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

Liu¹,

Jiang

Yang³

et al. 2023

Micromachines

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The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful measuring platform owing to its simple operational principle, favorable sensitivity and accuracy, mature fabrication, and low cost. Structural engineering in the sensing diaphragm and piezoresistor serves as a core issue in the construction of the micropressure sensor and undertakes the task of promoting the overall performance for the device. This paper focuses on the representative structural engineering in the development of the piezoresistive micropressure sensor, largely concerning the trade-off between measurement sensitivity and nonlinearity. Functional elements on the top and bottom layers of the diaphragm are summarized, and the influences of the shapes and arrangements of the piezoresistors are also discussed. The addition of new materials endows the research with possible solutions for applications in harsh environments. A prediction for future tends is presented, including emerging advances in materials science and micromachining techniques that will help the sensor become a stronger participant for the upcoming sensor epoch.

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Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Cited by 8 publications

References 18 publications

A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design

A method of performance enhancement for piezoresistive pressure sensors through diaphragm size design

Development of IOT-based low-cost MEMS pressure sensor for groundwater level monitoring

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

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