2013
DOI: 10.1039/c3ra40188j
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Simulation and modelling of sub-30 nm polymeric channels fabricated by electrostatic induced lithography

Abstract: This article demonstrates, through finite element analysis, the possibility to manufacture sub-30 nm polymeric channels using electrostatic induced lithography. Channels with a width of 25 nm, a depth of 50 nm and an inter-channel wall of 28 nm can be obtained by this patterning process. The influence of operational parameters such as the filling factor, the aspect ratio of the master electrode, the applied voltage and the gap between the two electrodes and initial film thickness has been studied in detail to … Show more

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Cited by 20 publications
(23 citation statements)
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“…For the purposes of this study we will consider that the width and the height of the protrusions are w ¼ 0:2 and p ¼ 0:2, respectively. Since the effect of these geometric characteristics have been discussed in detail for the case of a Newtonian liquid by [31], we will keep these values constant and focus our attention on the remaining parameters of our model. The size of the domain will be considered to be L ¼ 4ðs þ wÞ unless stated otherwise.…”
Section: Resultsmentioning
confidence: 99%
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“…For the purposes of this study we will consider that the width and the height of the protrusions are w ¼ 0:2 and p ¼ 0:2, respectively. Since the effect of these geometric characteristics have been discussed in detail for the case of a Newtonian liquid by [31], we will keep these values constant and focus our attention on the remaining parameters of our model. The size of the domain will be considered to be L ¼ 4ðs þ wÞ unless stated otherwise.…”
Section: Resultsmentioning
confidence: 99%
“…Examples of fully non-linear simulations without making use of the lubrication approximation are the works of [28][29][30][31] who studied primarily cases involving heterogeneous electric fields. Yang et al [30], motivated by the work of Heier et al [9], considered a sinusoidally patterned top electrode and performed non-linear simulations using a boundary/finite element method to determine the critical parameters for instability of the liquid film.…”
Section: Introductionmentioning
confidence: 99%
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“…During the past decade, many experimental and theoretical studies have been dedicated to understand the so‐called electrohydrodynamic instability patterning (EHDIP) process as this process holds the potential to generate arrays of self‐organized or customized periodic micro/nanostructures. In contrast to the dewetting process that cannot easily be altered since it is driven mostly by the material properties, the EHDIP method provides a facile and flexible control over the structure formation where a variety of morphologies, such as columns, channels, cavities and holes can be produced under different conditions.…”
Section: Introductionmentioning
confidence: 99%
“…12 Recently some irregular structures are produced by Tian et al, 13 also hieratical structures have been proved feasible by simulation and experiments via polymer/polymer/air tri-layer lm. Li et al employed this technique to fabricate microlens array, 11 the curvature of which is controlled by the amplitude of applied external electric eld.…”
Section: Introductionmentioning
confidence: 99%