Simulation and Correction of Angular Defects in Two-Photon Lithography

Lin, Chin Te; Fan, Hsu; Bouriau, Michel; Liao, Chao Yaug; Lin, Chih Lang; Masclet, Cédrîc; Léon, Jean-Claude; Chung, Tien Tung; Baldeck, Patrice L.

doi:10.2494/photopolymer.24.651

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Pp Process and Modelling1

Measurement Verification Of Line Smoothness1

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2013

2015

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Cited by 3 publications

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“…Additionally, they proposed equations for predictions of polymerized line widths and heights from applied intensity distributions. To achieve high accuracy Lin et al [102] simulated the influence of overexposure due to overlapping of single scanning paths. By this they were able to numerically Fig.…”

Section: Pp Process and Modellingmentioning

confidence: 99%

Micro additive manufacturing using ultra short laser pulses

Veld

Overmeyer

Schmidt³

et al. 2015

CIRP Annals

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Section: Pp Process and Modellingmentioning

confidence: 99%

Micro additive manufacturing using ultra short laser pulses

Veld

Overmeyer

Schmidt³

et al. 2015

CIRP Annals

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“…The exposure energy is proportional to the product of the exposure time and the square of the laser intensity. Since a polymerized structure is composed of the fabricated voxels, the voxels' exposure energies are added up into the spatial energy distribution which can be expressed as [8]:…”

Section: Measurement Verification Of Line Smoothnessmentioning

confidence: 99%

Measurement verification of line smoothness and surface roughness of micro products fabricated by two-photon polymerization

Chung

Hung

Tseng

et al. 2013

Eighth International Symposium on Precision Engineering Measurement and Instrumentation

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This paper studies the quality of lines and surfaces fabricated by the two-photon polymerization (TPP) technology. Micro lines and surfaces fabricated by TPP are accumulation of micro spots, and their external shapes can be simulated and predicted from manufacturing parameters, such as laser power, exposure time, scanning speed, spot gap, and line gap. The correctness of predicted shapes is verified by measuring product shapes by SEM and AFM. The purpose of this study is to find the best parameters for increasing line smoothness and reducing surface roughness. Firstly, the total energy absorbed in each point within the work piece space is simulated by adding up all the laser spots of the scanning path. The point with absorbed exposure energy exceeding the resin threshold energy forms a polymerized spot of the product, and the product shape can be obtained. Secondly, micro lines and surfaces with different manufacturing parameters are fabricated and product shapes are measured by both SEM and AFM. The simulated shape and the measured shape of the product with specific manufacturing parameters are compared. Shapes from simulation and fabrication have the same trend. Results of this study can be applied in manufacturing TPP products with complex shapes for better surface quality.

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