2012
DOI: 10.1016/j.proeng.2012.07.278
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Simplified Model for FEM Simulation of SAW Delay Line Sensor

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Cited by 11 publications
(4 citation statements)
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“…The temperature behavior of S11 is attributed to the thermal expansion, which would enlarge finger size (a) and spacing (b), and consequently causes the increase of the wavelength (since λ=2(a+b)). The increase of the wavelength would decrease the frequency according to (5). The transmission coefficient S21(f) is also represented in Figure 3c, for temperatures T ranging from -25°C to 175°C with a step of 50°C.…”
Section: Two Ports Delay Line Configurationmentioning
confidence: 96%
See 1 more Smart Citation
“…The temperature behavior of S11 is attributed to the thermal expansion, which would enlarge finger size (a) and spacing (b), and consequently causes the increase of the wavelength (since λ=2(a+b)). The increase of the wavelength would decrease the frequency according to (5). The transmission coefficient S21(f) is also represented in Figure 3c, for temperatures T ranging from -25°C to 175°C with a step of 50°C.…”
Section: Two Ports Delay Line Configurationmentioning
confidence: 96%
“…SAW sensors have many features that make them a favorable solution in various sensing applications [2], especially for environmental parameter measurement. Three configurations are mainly used as sensors: the one-port resonator, the two-port resonator [3,4], and the delay line [5,6]. A stack of semiconductor/piezoelectric/metal layers forms those devices where the top metal layer is patterned as IDTs (Inter Digital Transducers) and Bragg reflectors.…”
Section: Introductionmentioning
confidence: 99%
“…The finite-element modeling of piezoelectric material is well explained in [17][18][19]. The relation between the stress, strain, electric field, and electric displacement field in a stress-charge of a piezoelectric crystal is given by the piezoelectric linear constructive equations.…”
Section: Finite-element Modelingmentioning
confidence: 99%
“…Considerable attention has been paid to modeling SAW's responses to understand the characteristics of surface acoustic waves generated in SAW devices. Using COMSOL Multiphysics, 2D finite element models of SAW sensors based on piezoelectric thin films of aluminum-nitride (AlN) or zinc-oxide (ZnO) [1] and of YZ Lithium Niobate [2] were developed. Other works were focused on modeling a 3D Love wave based SAW sensor when considering SiO2 [3] and ZnO [4] as guiding layers.…”
Section: Introductionmentioning
confidence: 99%