2021
DOI: 10.1088/1361-6501/abd0bf
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Simplification of calibration of low-cost MEMS accelerometer and its temperature compensation without accurate laboratory equipment

Abstract: A nonlinear cost function is defined for field calibration of the accelerometer, using the rule that the norm of the measured vector in a static state is equal to the magnitude of the gravity vector. To solve this cost function, various optimization methods like Newton and Levenberg–Marquardt have been presented in different references. However, these methods are complicated, time-consuming, and require an initial value. This study presents a method that simplifies the cost function and obtains the error coeff… Show more

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Cited by 20 publications
(8 citation statements)
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“…Zhang adopted the method of finite element analysis to identify the parameters of the temperature drift model to realize the compensation of the capacitive MEMS accelerometer [ 21 ]. Khankalantary studied the relationship between the error coefficients and temperature and employed cubic spline interpolation to model the relationship to remove temperature effects [ 22 ]. Wang eliminated the temperature effects of MEMS resonant accelerometers with an optimized back propagation neural network (BP NN) [ 23 ].…”
Section: Introductionmentioning
confidence: 99%
“…Zhang adopted the method of finite element analysis to identify the parameters of the temperature drift model to realize the compensation of the capacitive MEMS accelerometer [ 21 ]. Khankalantary studied the relationship between the error coefficients and temperature and employed cubic spline interpolation to model the relationship to remove temperature effects [ 22 ]. Wang eliminated the temperature effects of MEMS resonant accelerometers with an optimized back propagation neural network (BP NN) [ 23 ].…”
Section: Introductionmentioning
confidence: 99%
“…For example, the common accelerometer calibration method described by Khan and Ranj [ 18 ] uses six specific positions where the sensor axes are precisely aligned along the axis of the calibration device. The accelerometer is calibrated by a specific position with a certain reference angle.…”
Section: Introductionmentioning
confidence: 99%
“…The temperature compensation of the MEMS accelerometer is achieved by simulating the deformation of the sensor chip [19]. Khankalantary used cubic spline interpolation to model the temperature dependence of the error coefficients to minimize temperature effects [20]. Yang proposed a simple mathematical model to obtain a more accurate and robust output of low-cost quartz accelerometers at high temperatures.…”
Section: Introductionmentioning
confidence: 99%