Simple, Repeatable, Fiber-Optic Intensity Sensor For Temperature Measurement

Abstract

We have demonstrated the performance of a fiber -optic intensity sensor for temperature measurement. The method measures the change in absorption with the temperature of light reflected from a thin silicon film deposited on the end of an optical fiber. Our single -ended sensing approach requires that the incident light intensity be reflected from both film surfaces and that these reflected signals re -enter the fiber. Simplifications in sensor fabrication have been shown to yield sensitivity comparable to that reported by other authors. Calibration data on the sensor is presented up to 400°C. Potential applications of the method are discussed.

An Angstrom-sensitive, differential MEMS capacitor for monitoring the milliliter dynamics of fluids

“…Our results demonstrate that our sensor is 17 times more sensitive than needed. Typically sensors intended to measure this difficult-to-measure range of flow rates and pressures in various fluids can be broken down into one of three categories: optical [19], thermal [20,21], or MEMS [22–25]. Flow sensing has also been accomplished utilizing devices that measure the fluid’s velocity via Doppler shift [26].…”

Recent Trends and Advancements in the field of Micro Electrical and mechanical Systems (MEMS) Technology

“…For potential clinical utility, the device canbe read transcutaneous, by inductive coupling to MEMS capacitive sensors in circuits, with resonant frequencies in the MHz (megahertz) range [3] . The flow rates for signal shifts ranging from 0-42 mL/h and differential pressure levels between 0.1 and 2 kPa [4] have been measured. The sensors are fabricated utilizing state-of-the-art MEMS technology.…”