Simple phase shifting lateral shearing interferometer based on a thick birefringent plate

Gu, Shuaiyan; Liu, Lei; Hu, Shiyu; Zeng, Aijun; Zhu, Linglin; Huang, Huijie

doi:10.1364/jot.84.000260

Cited by 1 publication

(1 citation statement)

References 14 publications

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“…But the requirements for the fabrication accuracy of the grating are very high, and the lateral sampling resolution is low, which leads to the great limitation of its imaging resolution [17,18]. Moreover, the non-common optical path system is difficult to debug and easy to produce additional errors [19][20][21]. Such as, there are some inventions about a phase-shifting lateral shearing interferometer, a polarization phase-shifting double shearing interference wavefront measuring instrument, and its test method [22].…”

Section: Introductionmentioning

confidence: 99%

Simultaneous two-step phase-shifting lateral shearing interferometry for aspherical surface based on an orthogonal shear displacer

Zhu

Tian²,

Wang³

et al. 2022

Eng. Res. Express

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A novel simultaneous two-step phase-shifting lateral shearing interferometry for aspherical surface based on an orthogonal shear displacer (OSD) is proposed, it is an effective technological measure of aspherical surface measurement, to effectively solve the non-uniformity of light intensity and limited transmission order caused by the beam displacer device. The OSD system is formed by the adoption of two-crystal polarization parallel beam displacers (PBDs), which makes it achieve the orthogonal shearing in the x- and y-directions simultaneously. A quarter-wave plate (QWP) is used to generate the desired phase-shifting, and four beam lateral shearing interference waves are simply generated in OSD orthogonal directions without any bulky and complicated optical components. The phase maps of the aspherical surface can be instantly obtained using the spatial phase-shifting technique with a polarization pixelated mask (or called Micro-Polarization Array: MPA) integrated into CCD. In this study, the proposed method was theoretically described and simulation results were analyzed. The simultaneous two-step phase-shifting lateral shearing interference fringes can be extracted in real-time with the MPA. The experiment results compared with the ZYGO interferometer were performed, and proved that the measurement error is not more than 2%. This interferometry has made it possible to improve the stability and feasibility of aspherical surface testing experiments.

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