Simple Method for the Determination of the Doping Profile in MIS Structures with Implanted Shallow p-n Junction

Lysenko, V. S.; Nazarov, A. N.; Rudenko, T. E.

doi:10.1515/9783112500941-066

October 16 1985

DOI: 10.1515/9783112500941-066

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Simple Method for the Determination of the Doping Profile in MIS Structures with Implanted Shallow p-n Junction

V. S. Lysenko¹,

A. N. Nazarov²,

T. E. Rudenko³

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Simple Method for the Determination of the Doping Profile in MIS Structures with Implanted Shallow p-n Junction

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