Simple fabrication of an uncooled Al/SiO2 microcantilever IR detector based on bulk micromachining

Abdollahi, Hassan; Hajghassem, Hassan; Mohajerzadeh, S.

doi:10.1007/s00542-013-1854-4

Cited by 9 publications

(4 citation statements)

References 33 publications

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“…Comparisons with corresponding theoretical values, calculated using Eqs. (4) and (5), are also shown in this figure. The experimental values follow theoretical ones in both cases.…”

Section: Resultsmentioning

confidence: 88%

“…In recent years the thrust has shifted more toward biomedical applications, waste energy harvesting, human movement detection, etc. [1][2][3][4][5]. Crystalline pyroelectric materials such as Triglycine sulfate (TGS) and deuterated TGS have extensively been used as thermal/IR detectors for many years owing to their high pyroelectric coefficient [6,7].…”

Section: Introductionmentioning

confidence: 99%

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Pyroelectricity in strontium barium niobate/polyurethane nanocomposites for thermal/infrared detection

Jayalakshmy

Philip

2015

Composites Science and Technology

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“…Comparisons with corresponding theoretical values, calculated using Eqs. (4) and (5), are also shown in this figure. The experimental values follow theoretical ones in both cases.…”

Section: Resultsmentioning

confidence: 88%

Section: Introductionmentioning

confidence: 99%

Pyroelectricity in strontium barium niobate/polyurethane nanocomposites for thermal/infrared detection

Jayalakshmy

Philip

2015

Composites Science and Technology

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“…The design parameters employed in the development of bimorph microcantilevers are presented in Table 2. -300 [35] Au 300 10 ~ 0.5 78 [36,37] 0.44 [33,38,39] 57 [40] The bilayer develops a radius of curvature (ρ) when released from the surface because of differential thermal expansion between layers during fabrication. This is the radius that a cantilever attains when it is released, and no fluid is flowing.…”

Section: Design Of Mems Microcantileversmentioning

confidence: 99%

Investigating flow induced mechanics of strain-engineered microcantilevers integrated in a flow-through system

Islam,

Challa,

Wei

et al. 2023

Preprint

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In this work we report the fabrication of stress-driven curled-up microcantilevers based on a metal-oxide bilayer design and their mechanical characterization in a flow-through system. Microcantilever arrays are realized by using conventional micromachining techniques involving optical lithography and etching processes. Due to the geometry of the out-of-plane curled cantilever, the load applied by the fluid flow is distributed along its body. These cantilevers showed mechanical robustness at flow velocity and drag force ranges of 0.48–5.7 mm/s and 0.35–4.23 µN, respectively for operation with glycerol. This fluid-driven approach enables us to measure multiple structures at once and get statistics on their mechanical performance, durability, and applicability in different devices.

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“…5(d)). 26 Double-sided lithography is used to pattern the front-side and back-side square windows. Cr is then etched by Ammonium Cerium (IV) Nitrate ((NH 4 ) 2 Ce(NO 3 ) 6 ) diluted with deionized water for 30 s (Fig.…”

Section: Device Fabricationmentioning

confidence: 99%

Simple Fabrication and Characterization of a Platinum Microhotplate Based on Suspended Membrane Structure

2014

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One of the key components of a microsensor is the Micro electromechanical system (MEMS) microheater. It has a wide range of applications such as gas sensors, pressure sensors, and so on. In this study, a platinum microhotplate based on suspended membrane structure is introduced. A simple microfabrication process is adopted to form the micromachined suspended microheater. Some integrated circuit processes such as E-beam evaporation of Pt and Au, oxidation, wet etching process, and photolithography process are used to fabricate the device. As the usage of deep-reactive ion etching and low-pressure chemical vapor deposition systems are avoided, the microfabrication process of the hotplate is accessible even in laboratories with limited equipment. In order to achieve uniform temperature distribution over the active heater area and to increase the robustness of the membrane, a thin silicon island was placed underneath the dielectric membrane. Thermal and thermomechanical behaviors of this structure obtained by finite element analysis show that the designed microhotplate is relatively strong. Experimental results show that power consumption and time constant are 50 mW and 4.23 ms, respectively, for the temperature variation from 30 • C to 500 • C in the fabricated microhotplates.

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Simple fabrication of an uncooled Al/SiO2 microcantilever IR detector based on bulk micromachining

Cited by 9 publications

References 33 publications

Pyroelectricity in strontium barium niobate/polyurethane nanocomposites for thermal/infrared detection

Pyroelectricity in strontium barium niobate/polyurethane nanocomposites for thermal/infrared detection

Investigating flow induced mechanics of strain-engineered microcantilevers integrated in a flow-through system

Simple Fabrication and Characterization of a Platinum Microhotplate Based on Suspended Membrane Structure

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