Simple experimental and analytical methods to estimate the power coupling efficiency in plasma discharges

Abstract

A simple experimental method to estimate the power effectively absorbed by a plasma is presented. It relies on a thermal management study that is applied to the whole discharge system, providing the energy released by the plasma and lost by convection and radiation at the reactor walls. The methodology is illustrated in the case of H2 Electron Cyclotron Resonance microwave plasma. Nevertheless, this method can be extended to a variety of electrical discharge or feed gases. Using this method, an experimental coupling efficiency of ∼22 ± ∼8% was derived. In comparison, an analytical balance of the plasma power absorption yields a theoretical coupling efficiency of ∼28 ± ∼9%.