Simple bond energy approach for non-destructive measurements of the fracture toughness of brittle materials

The fracture toughness of inorganic glasses

“…These few examples show that an efficient packing (large C g ) might compensate a weak bonding energy and vice‐versa, and that a minimum surface energy estimation is in agreement with the experimental values. A simple bond energy approach of fracture toughness was already proposed by previous authors for brittle materials. In this former study the surface energy for the fracture of crystalline solids was calculated for various crystallographic orientation using the actual lattice constants and the relevant bond dissociation energies.…”

Film Property Requirements for Hermetic Low-k a-SiOxCyNz:H Dielectric Barriers

“…1,12 Perhaps the most prominent example is the concomitant decrease in Young's modulus and fracture toughness that is accompanied by the introduction of increasing levels of nano-porosity in low-k ILD materials. [13][14][15][16][17][18] The reduction in these mechanical properties can lead to mechanical failure (cracking and delamination) 19,20 during down stream processing steps such as Cu chemical mechanical planarization (CMP) and/or packaging. 12,13,21 The introduction of nano-porosity has also been noted to degrade the electrical properties of low-k materials including increased leakage currents, decreased breakdown voltages (V bd ), and shortened times for time dependent dielectric breakdown failures (TDDB).…”

Evaluation of fracture toughness of ZrN hard coatings by internal energy induced cracking method

“…However, for an anisotropic material with strong texture, G C may be orientation dependent. King and Antonelli [46] indicated that G C is strongly associated with the number of broken bonds and crystal density. For ZrN, fracture on (111) plane should break more bonds than on (220) or (200) planes, and therefore G C on (111) is expected to be larger than that on (220) or (200).…”

“…For ZrN, fracture on (111) plane should break more bonds than on (220) or (200) planes, and therefore G C on (111) is expected to be larger than that on (220) or (200). From broken bond theory [46], taking bonding energy (E b,ZrN 0 ) of ZrN to be 565 ± 25 kJ/mol [47], G C of ZrN at different orientations can be calculated as G C,(200) = 17.9 ± 0.8 J/m 2 , G C,(220) = 25.3 ± 1.2 J/m 2 , and G C,(111) = 41.4 ± 1.9 J/m 2 , indicating that G C is orientation dependent. Similar computational results were reported by Bielawski and Chen [48].…”