2021
DOI: 10.1016/j.vacuum.2021.110505
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Silver films on aluminum alloy 6061 modified by ion bombardment improves surface reflectivity

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Cited by 7 publications
(3 citation statements)
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“…Since the target may be oxidized or contaminated by particles, a pre-sputtering process was carried out for half an hour before sputtering onto the substrate, ensuring the deposition of high quality Ag film. The sputtering parameters were set with a flow rate of 15 SCCM, a chamber pressure of 10 mTorr, and a power of 40 W. For Ag films with thicknesses above 200 nm, the reflectivity does not change with increasing thickness, [48][49][50] so the sputtering time was set to 1200 s.…”
Section: Design and Fabrication Of Microfluidic Chipsmentioning
confidence: 99%
“…Since the target may be oxidized or contaminated by particles, a pre-sputtering process was carried out for half an hour before sputtering onto the substrate, ensuring the deposition of high quality Ag film. The sputtering parameters were set with a flow rate of 15 SCCM, a chamber pressure of 10 mTorr, and a power of 40 W. For Ag films with thicknesses above 200 nm, the reflectivity does not change with increasing thickness, [48][49][50] so the sputtering time was set to 1200 s.…”
Section: Design and Fabrication Of Microfluidic Chipsmentioning
confidence: 99%
“…The room and initial temperatures of the model were 293.15 K. For the experimental evaluation, the μTEG was irradiated by a continuous laser with powers of 0.1, 0.2, 0.3, and 0.4 W; the μTEG had a spot that covered the top surface of the device. As the reflectivity of magnetron sputtered Ag for 1064-nm-laser was ≈98.5%, [37,38] the absorbed heat of the device could be calculated as 1.5, 3, 4.5, and 6 mW for heat fluxes of 500, 1000, 1500, and 2000 W m −2 , respectively.…”
Section: Finite Element Modeling and Experimental Textmentioning
confidence: 99%
“…However, the soft texture of the aluminum alloy surface and its susceptibility to scratching are also apparent, thus limiting its application in the visible light field. Modification on the substrate surface is a common method to improve the optical performance of the mirror surface [3,4]. Ni-P alloys are an excellent modified layer material that is widely used in the aviation and defense industries [5,6].…”
Section: Introductionmentioning
confidence: 99%