Silicone polymer deposition by CO2 laser induced decomposition of silane in the presence of methyl methacrylate

UV Laser Photolysis of Disiloxanes for Chemical Vapor Deposition of Nano-Textured Silicones

“…27 Solid-state MAS and CP MAS NMR experiments were conducted on a Bruker DSX200 NMR spectrometer in a 4-mm broadband probe. 13 C and 29 Si NMR spectra were externally referenced to the carbonyl line of glycine (δ ) 176.03) and to the M unit line of M8Q8 (δ ) 11.5), respectively. The samples were spun with spinning speed of 1600 Hz for 29 Si CP MAS experiments, 2500 Hz for 29 Si MAS experiments, and 4000 Hz for 13 C experiments.…”

“…13 C and 29 Si NMR spectra were externally referenced to the carbonyl line of glycine (δ ) 176.03) and to the M unit line of M8Q8 (δ ) 11.5), respectively. The samples were spun with spinning speed of 1600 Hz for 29 Si CP MAS experiments, 2500 Hz for 29 Si MAS experiments, and 4000 Hz for 13 C experiments. Relaxation delay of 60 s for all MAS experiments and 6 s for all CP MAS experiments were used.…”

“…Relaxation delay of 60 s for all MAS experiments and 6 s for all CP MAS experiments were used. CP delays of 2 ms and 5 ms were used for 13 C and 29 Si CP MAS experiments, respectively. Usually about 1000 scans were accumulated for any of the experiments, the exception being 12000 scans for 13 C CP MAS experiments on the solid obtained from 1,1-dimethyldisiloxane.…”

“…Silicon oxycarbides have recently been paid much attention because of their significance in applied materials research (e.g., refs −4). Various Si/C/O and Si/C/H/O phases were produced by pyrolysis of polysiloxanes (e.g., refs −7), polysiloxane gels (e.g., refs and ), pyrolytic laser-aerosol interaction, and plasma , or laser (e.g., refs −15) interaction with gaseous organosilanes.…”

Laser-assisted deposition of thin films from gas-phase and surface-adsorbed molecules

“…A solid polymer with poly(dimethylsiloxane) structure has been deposited by using a TEA C02 laser to irradiate a methylmethacrylate (MMA)/SiH4 mixture. 316 Collisionally assisted infrared laser multiple-photon dissociation of the silane produces SiH2 radicals that add to the carbon double bonds in MMA to form three-membered rings, which then decompose into a siloxane polymer. Also, 1-methyl-l-silacyclobutane has been decomposed by CW C02 laser heating of an SF6 sensitizer to form an organosilicon polymer.317…”