Silicon technologies for arrays of Single Photon Avalanche Diodes

Gulinatti, Angelo; Ceccarelli, Francesco; Rech, Ivan; Ghioni, M.

doi:10.1117/12.2223884

Cited by 7 publications

(11 citation statements)

References 37 publications

(46 reference statements)

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“…Measurement times are usually long, due to the need of accumulating sufficient statistics. Several (small) arrays of devices fabricated in custom technologies have been employed over the years with success [2, [101][102][103][104][105][106], and parallelization strategies have again been adopted to increase the overall throughput, often employing sophisticated optical setups (multispot excitation and detection). For example, a parallel 8-spot single-molecule FRET (smFRET) analysis system is described in [107,108] using 8-pixel SPAD arrays, as well as in [109], where the authors tackle realtime kinetic analysis of promoter escape by bacterial RNA polymerase, confirming results obtained by a more indirect route.…”

Section: Single-molecule Techniquesmentioning

confidence: 99%

Single-photon avalanche diode imagers in biophotonics: review and outlook

et al. 2019

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Single-photon avalanche diode (SPAD) arrays are solid-state detectors that offer imaging capabilities at the level of individual photons, with unparalleled photon counting and time-resolved performance. This fascinating technology has progressed at a very fast pace in the past 15 years, since its inception in standard CMOS technology in 2003. A host of architectures have been investigated, ranging from simpler implementations, based solely on off-chip data processing, to progressively “smarter” sensors including on-chip, or even pixel level, time-stamping and processing capabilities. As the technology has matured, a range of biophotonics applications have been explored, including (endoscopic) FLIM, (multibeam multiphoton) FLIM-FRET, SPIM-FCS, super-resolution microscopy, time-resolved Raman spectroscopy, NIROT and PET. We will review some representative sensors and their corresponding applications, including the most relevant challenges faced by chip designers and end-users. Finally, we will provide an outlook on the future of this fascinating technology.

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Section: Single-molecule Techniquesmentioning

confidence: 99%

Single-photon avalanche diode imagers in biophotonics: review and outlook

et al. 2019

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“…To better appreciate the structure of the array [9], Fig. 2 shows the cross section of the single pixel.…”

Section: ×1 Re-spad Arraymentioning

confidence: 99%

Red-Enhanced Photon Detection Module Featuring a $32 \times 1$ Single-Photon Avalanche Diode Array

Ceccarelli

Gulinatti

Labanca

et al. 2018

IEEE Photon. Technol. Lett.

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In this letter, the development and the experimental characterization of a new photon detection module, based on a 32×1 red-enhanced single-photon avalanche diode (RE-SPAD) array, are presented. A custom-developed technology has been exploited to design a detector having large-area pixels (50-µm diameter) with optimized performance. With an excess bias voltage = 15 V, a photon detection efficiency as high as 57% at 600 nm (33% at 800 nm) is achieved, along with dark count rate in the kHz range and optical crosstalk probability as low as 0.29%. The remarkable detection efficiency of the RE-SPAD array makes the module particularly suitable for all applications where high detection efficiency in the red/near-infrared range is mandatory. As an example, the performance of the array module is demonstrated to match the demanding requirements of multispot single-molecule fluorescence spectroscopy.

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“…The wide use of these dyes has led to the development of red enhanced SPAD (RE-SPAD). Traditional SPADs have a QE of 15% at 800 nm wavelengths but newer RE-SPADs have a QE of 40-60% [93,94]. Recently, a parallelization of RE-SPADs has been fabricated and tested [94].…”

Section: Next Generation Photodetectorsmentioning

confidence: 99%

“…Traditional SPADs have a QE of 15% at 800 nm wavelengths but newer RE-SPADs have a QE of 40-60% [93,94]. Recently, a parallelization of RE-SPADs has been fabricated and tested [94]. A new type of SPAD architecture has been implemented to enhance the electrical isolation between individual SPAD elements to reduce crosstalk [94].…”

Section: Next Generation Photodetectorsmentioning

confidence: 99%

“…Recently, a parallelization of RE-SPADs has been fabricated and tested [94]. A new type of SPAD architecture has been implemented to enhance the electrical isolation between individual SPAD elements to reduce crosstalk [94]. These RE-SPAD array detectors are still in their infancy and further characterization of detector parameters (temporal resolution, dark count rate, after-pulsing, etc.)…”

Section: Next Generation Photodetectorsmentioning

confidence: 99%

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Detectors for Super-Resolution & Single-Molecule Fluorescence Microscopies

Youker¹

2018

Photon Counting - Fundamentals and Applications

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The resolution of light microscopy was thought to be limited to 250-300 nanometers based on the work of Ernest Abbe. This Abbe diffraction limit was believed to be insurmountable until the invention of Super-resolution microscopic techniques in the late 20th century. These techniques remove this limit and have provided unprecedented detail of cellular structures and dynamics down to several nanometers. An emerging goal in this field is to quantitatively measure individual molecules. Measurement of single-molecule dynamics, such as diffusion coefficients and complex stoichiometries, can be accomplished using fluorescence fluctuation techniques to reveal nanosecond-to-microsecond temporal reactions. These powerful complimentary experimental approaches are made possible by sensitive low-light photodetectors. In this chapter, an overview of the principles of super-resolution and single-molecule microscopies are provided. The different types of photodetectors employed in these techniques are explained. In addition, the advantages and disadvantages for these detectors are discussed, as well as the development of next generation detectors. Finally, example super-resolution and single-molecule cellular studies that take advantage of these detector technologies are presented.

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Silicon technologies for arrays of Single Photon Avalanche Diodes

Cited by 7 publications

References 37 publications

Single-photon avalanche diode imagers in biophotonics: review and outlook

Single-photon avalanche diode imagers in biophotonics: review and outlook

Red-Enhanced Photon Detection Module Featuring a $32 \times 1$ Single-Photon Avalanche Diode Array

Detectors for Super-Resolution & Single-Molecule Fluorescence Microscopies

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