Silicon resonator sensor systems using self-mixing interferometry

Hauptmann, Marc; Grattan, K.T.V.; Palmer, A. W.; Fritsch, Holger; Lücklum, Ralf; Hauptmann, P.

doi:10.1016/s0924-4247(97)80059-3

Cited by 11 publications

(7 citation statements)

References 12 publications

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“…In the weak injection regime [12], [17], which is observed with the low-level backward signal provided by our target ( ), is virtually equal to the unperturbed laser pulsation…”

Section: The Optical Measurement Methodsmentioning

confidence: 60%

Comparison of capacitive and feedback-interferometric measurements on MEMS

Annovazzi-Lodi

Merlo

Norgia

2001

J. Microelectromech. Syst.

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In this paper, we consider a typical microelectromechanical structure consisting of a small mass suspended by four laminar springs, which can be forced to vibrate by electrical actuation, and represents the basic block of many accelerometers, gyros and resonators. Measurements of parameters, such as the actuation efficiency, the resonance frequency and the quality factor, have been performed for such device by feedback interferometry, and the results are compared with data obtained by the standard capacitive method. [622] Index Terms-Mechanical variables measurement, microsensors, microelectromechanical systems (MEMS), micromachining, optical interferometry. Valerio Annovazzi-Lodi (M'89-SM'99) was born in Novara, Italy, on November 7, 1955. He received the degree in electronic engineering from the University of Pavia, Pavia, Italy, in 1979. Since then he has been working at the Department of Electronics of the University of Pavia in the fields of electronics and electrooptics. His main research interests include injection phenomena and chaos in oscillators and lasers, electrical fiber sensors, the fiber gyroscope, passive fiber components for telecommunications and sensing, optical amplifiers, trasmission via diffused infrared radiation, micromechanical systems. In 1983, he became a Staff Researcher of the Department of Electronics of the University of Pavia, in 1992 an Associate Professor, and in 2001, a Full Professor of the same institution. He is the author of more than 80 papers and holds four patents. Dr. Annovazzi-Lodi is a member of AEI. Sabina Merlo (M'01) was born in Pavia, Italy, in 1962 and received the degree in electronic engineering from the University of Pavia in 1987. She was recipient of a Rotary Foundation Graduate Scholarship for studying at the University of Washington, Seattle. In 1989, she received the M.S.E. degree in bioengineering from the University of Washington. In 1991, she received the Ph.D. degree in electronic engineering from the University of Pavia. Since 2001, she has been Associate Professor with the Department of Electronics at the University of Pavia. Her main research interests include fiber-optic passive components and sensors, optical amplifiers, laser interferometry and microelectromechanical systems. She holds three patents and is the author of approximately 50 papers. Dr. Merlo is a member of AEI. Michele Norgia (S'98-M'00) was born in Omegna, Italy, in 1972. He received the degree in electronics engineering from the University of Pavia, Italy, in 1996 with a thesis on noise in optical amplifiers and the the Ph.D. degree in electronics engineering and computer science from the University of Pavia, working in the Optoelectronics Group. In 1997, he spent five months as a visiting student at CSELT, Torino, Italy, where he worked on fiber Bragg gratings. His main research interests are noise in optical amplifiers, interferometry and microelectromechanical sensors, and he is the author of 15 papers.

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“…In the weak injection regime [12], [17], which is observed with the low-level backward signal provided by our target ( ), is virtually equal to the unperturbed laser pulsation…”

Section: The Optical Measurement Methodsmentioning

confidence: 60%

Comparison of capacitive and feedback-interferometric measurements on MEMS

Annovazzi-Lodi

Merlo

Norgia

2001

J. Microelectromech. Syst.

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“…In the following, however, we will focus on the weak injection regime [12], [14], [15], which is observed with the low-level backward signals provided by our diffusing target at a small angle . In this regime, the frequency modulation in (1) is weak.…”

Section: Measurementsmentioning

confidence: 99%

Measurements on a micromachined silicon gyroscope by feedback interferometry

Annovazzi-Lodi¹,

Merlo²,

Norgia³

2001

IEEE/ASME Trans. Mechatron.

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Feedback interferometry is a useful tool to characterize micromachined devices. In this paper, we consider a silicon vibrating gyroscope, in which the angular rotation is transduced into the vibration amplitude of a small suspended mass. Measurements of the mass displacement at submicrometer resolution are reported on a 400 400 m sensor, using an 800-nm 20-mW laser diode. The resonance curves of the device have been determined for different values of pressure and other parameters, which allows us to tune the resonance frequency and maximize the factor. Hysteresis and other nonlinear phenomena on specific samples also have been detected. The proposed method provides a direct inspection tool and represents a practical alternative to the standard electrical measurements.

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“…The simplest method for displacement measurements with the feedback interferometer still consists in counting the transitions, that is the interferometric fringes since each transition corresponds to a λ/2 displacement. This technique can also be applied for amplitude vibration measurements, as reported in [28] for the investigation of silicon microresonator properties.…”

Section: Vibrometry and Displacement Measurementmentioning

confidence: 99%