Silicon photonic crystal filter with ultrawide passband characteristics

Baldycheva, Anna; Tolmachev, V. A.; Perova, Tatiana S.; Zharova, Yu. A.; Astrova, E. V.; Berwick, Kevin

doi:10.1364/ol.36.001854

Cited by 24 publications

(7 citation statements)

References 7 publications

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“…Such a structure differs from common 1D photonic crystals based on bilayer structures or even of a more specific case of threelayered structures described previously (see, e.g. [24,25]). In our case, the proper choice of RLVs can provide the unit cell consisting of arbitrary number of layers, therefore the unit cell may exceed an overall thickness of the structure.…”

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confidence: 81%

Quasiperiodic one-dimensional photonic crystals with adjustable multiple photonic bandgaps

et al. 2017

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We propose an elegant approach to produce photonic band gap structures with multiple photonic band gaps (PBGs) by constructing quasiperiodic photonic crystals (QPPCs) composed by a superposition of photonic lattices with different periods. Generally QPPC structures exhibit both aperiodicity and multiple PBGs due to their long-range order. They are described by a simple analytical expression instead of quasiperiodic tiling approaches based on substitution rules. Here we describe the optical properties of quasiperiodic photonic crystals exhibiting two PBGs that can be tuned independently. PBG interband spacing and their depths can be varied by choosing appropriate reciprocal lattice vectors and their amplitudes. These effects are confirmed by the proof-of-concept measurements made for the porous silicon based QPPC of the appropriate design.

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confidence: 81%

Quasiperiodic one-dimensional photonic crystals with adjustable multiple photonic bandgaps

et al. 2017

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“…[10,15], for example. Utilisation of secondary, and higher order, PBGs allow further applications of 1D PCs, including Fabry-Pérot optical filters with tunable resonance peaks of high-order [16], or the formation of wide-band windows of transparency in Si [17]. For these structures [16,17], a large variation of filling fractions,…”

Section: Introductionmentioning

confidence: 99%

Influence of Fluctuations of the Geometrical Parameters on the Photonic Band Gaps in One-Dimensional Photonic Crystals

Tolmachev¹,

Baldycheva²,

Berwick³

et al. 2012

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Abstract-The influence of random fluctuations in the layer thicknesses in high contrast, one-dimensional Photonic Crystals (PCs) on the transmission spectra and Photonic Band Gaps (PBGs) is investigated. The change in the PBGs depends on the magnitude of the fluctuations and increases with an increase in the order of the PBG. Introducing thickness non-uniformity into the PC of up to 0.004 times the value of lattice constant for different types of fluctuation distributions has a negligible effect on either the position or the shape of the 1st and nearest PBGs. The approach suggested here allows the determination of the tolerances required in the geometrical parameters of PCs during fabrication. It also allows the optimisation of PC structures using high order PBGs.

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“…Such tuning of a photonic bandgap by a third layer (SiO 2 ) has been performed by oxidizing the surface of Si. 17 Fabrication of photonic crystals by ALD can also be applied toward realization of two dimensional PhCs (Ref. 18) as well as other kinds of structured functional materials such as epsilon-near-zero metamaterials.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition

Shkondin¹,

Takayama²,

Lindhard³

et al. 2016

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Articles you may be interested inThe authors report on the fabrication of TiO 2 and Al 2 O 3 nanostructured gratings with an aspect ratio of up to 50. The gratings were made by a combination of atomic layer deposition (ALD) and dry etch techniques. The workflow included fabrication of a Si template using deep reactive ion etching followed by ALD of TiO 2 or Al 2 O 3 . Then, the template was etched away using SF 6 in an inductively coupled plasma tool, which resulted in the formation of isolated ALD coatings, thereby achieving high aspect ratio grating structures. SF 6 plasma removes silicon selectively without any observable influence on TiO 2 or Al 2 O 3 , thus revealing high selectivity throughout the fabrication. Scanning electron microscopy was used to analyze every fabrication step. Due to nonreleased stress in the ALD coatings, the top parts of the gratings were observed to bend inward as the Si template was removed, thus resulting in a gradual change in the pitch value of the structures. The pitch on top of the gratings is 400 nm, and it gradually reduces to 200 nm at the bottom. The form of the bending can be reshaped by Ar þ ion beam etching. The chemical purity of the ALD grown materials was analyzed by x-ray photoelectron spectroscopy. The approach presented opens the possibility to fabricate high quality optical metamaterials and functional nanostructures.

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Silicon photonic crystal filter with ultrawide passband characteristics

Cited by 24 publications

References 7 publications

Quasiperiodic one-dimensional photonic crystals with adjustable multiple photonic bandgaps

Quasiperiodic one-dimensional photonic crystals with adjustable multiple photonic bandgaps

Influence of Fluctuations of the Geometrical Parameters on the Photonic Band Gaps in One-Dimensional Photonic Crystals

Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition

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