Silicon oxycarbide thin films deposited from viniltrimethoxysilane ion beams

Synthesis and Photoluminescence of Amorphous Silicon Oxycarbide Nanowires

“…The broad but intense absorption at 3150−3650 cm −1 with the maximal absorption at 3421 cm −1 can be attributed to an O−H stretch. These results are completely in agreement with previously reported findings of amorphous silicon oxycarbide thin films and nanotubes [12,[26][27][28].…”

Influence of deposition parameters on optical properties of silicon oxycarbide thin films

“…Therefore, SiCO thin films can be used as antireflection film, window material of silicon-based optoelectronic devices and solar cells [1][2][3][4]. So far, the methods to prepare SiCO include sol-gel, plasma enhanced chemical vapor deposition (PECVD), ion beam synthesis [5][6][7][8][9]. However, the operating temperatures of above techniques are required to high temperature (more than 1000 o C) [6][7][8], which leads to more defects in the interface of thin film and substrate, phase separation and crystallization.…”

“…So far, the methods to prepare SiCO include sol-gel, plasma enhanced chemical vapor deposition (PECVD), ion beam synthesis [5][6][7][8][9]. However, the operating temperatures of above techniques are required to high temperature (more than 1000 o C) [6][7][8], which leads to more defects in the interface of thin film and substrate, phase separation and crystallization. Furthermore, the SiCO materials fabricated by chemical means remained a significant organic character which limited their inorganic character and thermal stability [4].…”

Optical Constants of Thin Films of Silicon Oxycarbide Using the Transmission Spectrum

“…[2][3][4] As kind of Si-based films, silicon oxycarbide (SiC x O 4-x ) thin films probably integrate the excellent characteristics of SiC and SiO x films, such as high hardness, good thermal conductivity and stability, and large band gap. [5][6][7][8] And they may have many potential applications, especially optical applications. As the optical constants are important references for their optical applications, many researchers are interested in the optical study of SiC x O 4-x thin films.…”

“…As the optical constants are important references for their optical applications, many researchers are interested in the optical study of SiC x O 4-x thin films. [5][6][7][8] So the method of obtaining the optical constants exactly is very essential.…”