Silicon Oxycarbide Platform for Integrated Photonics

Abstract

In this paper we present silicon oxycarbide (SiOC) as a potential dielectric platform for integrated photonic applications. By controlling the amount of carbon and oxygen in the composition of SiOC films, which in this work are deposited by using a reactive RF magnetron sputtering process, the refractive index of the material can be widely tuned from less than that of silica 1.40 to almost that of silicon carbide (3.0), while keeping high transparency in the near-infrared wavelength range. An indepth analysis of the structural, morphological and optical properties of the deposited SiOC thin films is reported, pointing out the relationship between the change in the film composition and the tuneability of the refractive index. Single mode optical waveguides with a refractive index contrast of up to 28% and propagation loss as low as 2 dB/cm at 1550 nm are demonstrated. An integrated Mach-Zehnder interferometer is presented as a first example of PIC realized on high refractive index SiOC platform. Results show that SiOC is a promising alternative to conventional dielectric platforms for the realization of PICs.

Programmable photonic circuits

“…Research on improved or alternate approaches to phase shifters is very active. The various approaches include materials with high thermo-optic coefficient [58], piezoactuators [59], [60], liquid crystals [61], [62], Pockels effect in perovskites [63]- [65] or polymers [66], and micro-electromechanical systems (MEMS) [67], [68]. Nonvolatile actuators, which maintain their state without an 'always-on' control signal, are also interesting.…”

Simulation-Based Design and Evaluation of Temperature Insensitive Device for SiOC on Insulator Platform

“…Ye et al [31] in order to reduce temperature shift proposed silicon waveguide filters by using negative thermo-optic coefficient polymer cladding for compensating the silicon material positive thermo-optic coefficient. An experimental integrated Mach-Zehnder interferometer is presented as a first example of PIC realized on high refractive index SiOC platform [32], whereas we introduced MZI based temperature insensitive sensor using SiOC. Abi et al [33] proposed design and experimental authentication of the SiOC based devices i.e., waveguide and directional coupler for a waveguide dimension of 1300 × 200 nm 2 having gap of 1000 nm, whereas our research was based on 220 nm height of waveguide, and we introduced MZI based sensor using SiOC based waveguides.…”

Synthesis and Characterization of High Surface Area Transparent SiOC Aerogels from Hybrid Silicon Alkoxide: A Comparison between Ambient Pressure and Supercritical Drying

“…Transparent SiOC glasses can be obtained when a dried gel is pyrolysized in the presence of hydrogen gas, where H 2 reacts with the organic groups to form methane gas, thus removing the excess carbon [9,11]. Synthesis of highly porous SiOC glasses may have potential applications in dielectrics for integrated photonics [12], gas sensors [13,14], and materials for lithium-ion batteries [15], biosensors, and photovoltaic cells. Moreover, SiOC glasses have high temperature resistances up to 1200 • C either in oxidizing or in inert atmospheres [10].…”