Optoelectronics - Materials and Techniques 2011
DOI: 10.5772/20156
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Silicon Oxide (SiOx, 0&ltx&lt2): a Challenging Material for Optoelectronics

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Cited by 39 publications
(48 citation statements)
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“…At low lignin:silica ratios of the three lignin coprecipitates, there is a band at 800 cm -1 characteristic of the pure silica sample, that shifts to 830 cm -1 at higher lignin:silica ratios. Variations of the 850-750 cm -1 band have been correlated to differences in the oxygen content of the samples, with shifts towards larger wavenumber values in case of higher oxygen contents, while its width becomes smaller (Tomozeiu 2011). Accordingly, the surface of the coprecipitate has a different oxygen substitution pattern than that of the silica alone.…”
mentioning
confidence: 98%
“…At low lignin:silica ratios of the three lignin coprecipitates, there is a band at 800 cm -1 characteristic of the pure silica sample, that shifts to 830 cm -1 at higher lignin:silica ratios. Variations of the 850-750 cm -1 band have been correlated to differences in the oxygen content of the samples, with shifts towards larger wavenumber values in case of higher oxygen contents, while its width becomes smaller (Tomozeiu 2011). Accordingly, the surface of the coprecipitate has a different oxygen substitution pattern than that of the silica alone.…”
mentioning
confidence: 98%
“…This phenomenon was already described by Petrik et al [10] and may indicate a slight inhomogeneity in thickness or refractive index or other non-ideality of the layer that are not taken into account by these models. Based on ellipsometry studies of the Si/SiO 2 interfaces [12,14] and on the high value of the extracted refractive index (3.17), the composition of the SiO x interface layer could be roughly estimated to x < 0.4. However, even with a SiO x interface layer, an increase of the extracted Al 2 O 3 refractive index is observed for thickness below 10 nm.…”
Section: Characterization Of Al 2 O 3 Thin Films By Ellipsometrymentioning
confidence: 99%
“…From dispersion curves shown in Figure 5 for SiO x films, it is possible to see a relationship between refractive index of the films and their evaporation rates; refraction index increase as evaporation rate increase. Previous works on the synthesis of SiO x films, have shown a direct relation between the stoichiometry x and the refractive index of the films [7]- [10]. Figure 6 shows the refraction index of SiO x films at 633 nm as a function of evaporation rate, when deposited with high vacuum process of about ~10 −6 Torr.…”
Section: Ellipsometry Of Sio X Thin Filmsmentioning
confidence: 99%
“…A. Woollam M-2000 spectroscopic ellipsometer shown in Figure 1, with spectral range from 245 to 1000 nm, at incidence angles of 55˚, 65˚ and 75˚. It is known that SiO x films growth by thermal evaporation have an amorphous random network of tetrahedral coordinated silicon and oxygen and its stoichiometry is a function of the oxygen partial pressure and evaporation rate [10]. In this work, SiO x thin films were deposited in a room temperature substrate (~30˚C), varying the evaporation rate and vacuum pressure of the chamber.…”
Section: Methodsmentioning
confidence: 99%
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