Silicon on-chip bandpass filters for the multiplexing of high sensitivity photonic crystal microcavity biosensors

Yan, Hai; Zou, Yi; Chakravarty, Swapnajit; Yang, Chun Ju; Wang, Zheng; Tang, Naimei; Fan, Donglei; Chen, Ray T.

doi:10.1063/1.4916340

Cited by 50 publications

(26 citation statements)

References 24 publications

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“…[24][25][26] Plenty devices have been proposed and demonstrated, such as surface plasmon devices, [27][28][29] micro-ring resonators, [30][31][32] silicon nanowires, 33) nanoporous silicon waveguides, 34) 1D and 2D PC microcavities. [35][36][37][38] These structures are based on the interaction between the evanescent wave and the analytes immobilized on the sensor surface, e.g., micro-ring resonators on SOI substrates. 30) Intensive efforts focus on boosting the sensitivity and improving the detection limit.…”

Section: Introductionmentioning

confidence: 99%

Periodic waveguide structures for on-chip modulation and sensing

Chung

Pan

et al. 2018

Jpn. J. Appl. Phys.

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In this paper, we summarize the recent progress on silicon photonics modulators and sensors with an emphasize on the innovation in waveguide structure. We will introduce two types of waveguide, one-dimensional (1D) slot photonic crystal waveguide (SPCW) and subwavelength grating (SWG) waveguide. The simple geometry of 1D SPCW makes it more robust to fabrication imperfections and helps reduce its propagation loss, while still maintaining the benefit of slow light. The effective electro-optic (EO) coefficient increases to 490 pm/V. The electromagnetic (EM) wave sensor developed based on this waveguide shows a sensitivity of 1.8 V/m at 14.1 GHz, which is the most sensitive EM wave sensor that has been reported. The SWG waveguide ring resonator has a bulk sensitivity more than 400 nm/RIU, which is much higher than its strip waveguide counterpart. Furthermore, its surface sensitivity is relatively independent of the thickness of analytes accumulated on its surface. These features make it an appealing sensing platform. © 2018 The Japan Society of Applied Physics 2. One-dimensional slot photonic crystal waveguide 2.1 One-dimensional slot photonic crystal waveguide structure The photon-matter interaction in space domain can be quantified by mode-volume overlap, which is defined as the percentage of optical energy existing in materials or analytes of interest. To increase the mode volume overlap, slot

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Section: Introductionmentioning

confidence: 99%

Periodic waveguide structures for on-chip modulation and sensing

Chung

Pan

et al. 2018

Jpn. J. Appl. Phys.

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“…Various resonance structures have been proposed to optimize the performance of these sensors, including two-dimensional photonic crystal (PhC) micro-cavity resonators [1][2][3][4], one dimensional PhC nanobeam resonators [5][6][7][8], disk resonators [9,10], and ring resonators [11][12][13]. High sensitivity (S) is required in those sensors, which strongly depends on optical loss, light polarization, and the overlap between light and the surrounding material.…”

Section: Introductionmentioning

confidence: 99%

Improving the detection limit for on-chip photonic sensors based on subwavelength grating racetrack resonators

Huang¹,

Yan²,

Xu³

et al. 2017

Opt. Express

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Abstract:Compared to the conventional strip waveguide microring resonators, subwavelength grating (SWG) waveguide microring resonators have better sensitivity and lower detection limit due to the enhanced photon-analyte interaction. As sensors, especially biosensors, are usually used in absorptive ambient environment, it is very challenging to further improve the detection limit of the SWG ring resonator by simply increasing the sensitivity. The high sensitivity resulted from larger mode-analyte overlap also brings significant absorption loss, which deteriorates the quality factor of the resonator. To explore the potential of the SWG ring resonator, we theoretically and experimentally optimize an ultrasensitive transverse magnetic mode SWG racetrack resonator to obtain maximum quality factor and thus lowest detection limit. A quality factor of 9800 around 1550 nm and sensitivity of 429.7 ± 0.4nm/RIU in water environment are achieved. It corresponds to a detection limit (λ/S·Q) of 3.71 × 10 4 RIU, which marks a reduction of 32.5% compared to the best value reported for SWG microring sensors.

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“…12 Slab-PhCs have resonant mode volumes on the order of cubic microns or smaller, allowing them to probe extremely small analyte volumes (tens of femtoliters). With near-planar footprints on the order of tens of square microns, slab-PhC structures are compatible with CMOS fabrication techniques for mass-produced, large-scale, high-density integrated photonic chips.…”

Section: Introductionmentioning

confidence: 99%

Recognition-mediated particle detection under microfluidic flow with waveguide-coupled 2D photonic crystals: towards integrated photonic virus detectors

2017

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Label-free biodetection schemes compatible with standard CMOS fabrication methods constitute an important goal, as these are enabling tools for the mass production of high-sensitivity biosensors. Two-dimensional slab photonic crystal (2D slab-PhC) sensors have been posited as ultrahigh-sensitivity detection components, but to date recognition-mediated detection of viruses or simulants under flow has not been demonstrated. We report the design and optimization of a new W1 waveguide-coupled 2D slab-PhC sensor, with a geometry well suited to virus detection. Proof of concept experiments with fluorescent latex particles verified that the sensor could respond to infiltration of a single particle, both in air and under an aqueous cover layer. Subsequent experiments with antibody-functionalized sensors and virus simulants confirmed the ability of the device to detect virus-sized particles under flow via a recognition-mediated process. This work sets the stage for incorporation of 2D slab-PhC sensors into fully integrated photonic sensor systems.

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Silicon on-chip bandpass filters for the multiplexing of high sensitivity photonic crystal microcavity biosensors

Cited by 50 publications

References 24 publications

Periodic waveguide structures for on-chip modulation and sensing

Periodic waveguide structures for on-chip modulation and sensing

Improving the detection limit for on-chip photonic sensors based on subwavelength grating racetrack resonators

Recognition-mediated particle detection under microfluidic flow with waveguide-coupled 2D photonic crystals: towards integrated photonic virus detectors

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