2015
DOI: 10.1063/1.4929779
|View full text |Cite
|
Sign up to set email alerts
|

Silicon-nitride photonic circuits interfaced with monolayer MoS2

Abstract: We report on the integration of monolayer molybdenum disulphide with silicon nitride microresonators assembled by visco-elastic layer transfer techniques. Evanescent coupling from the resonator mode to the monolayer is confirmed through measurements of cavity transmission. The absorption of the monolayer semiconductor flakes in this geometry is determined to be 850 dB/cm, which is larger than that of graphene and black phosphorus with the same thickness. This technique can be applied to diverse monolayer semic… Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

1
35
2

Year Published

2017
2017
2022
2022

Publication Types

Select...
7
1

Relationship

1
7

Authors

Journals

citations
Cited by 41 publications
(38 citation statements)
references
References 30 publications
1
35
2
Order By: Relevance
“…3(a)], we assume that the intrinsic loss (composed of scattering loss, material absorption loss, and bending loss) of the microrings remains unchanged after the GST deposition and RTA. The loss introduced by GST can then be estimated as the difference in the loss of the microring before and after GST deposition [38]:…”
Section: Resultsmentioning
confidence: 99%
“…3(a)], we assume that the intrinsic loss (composed of scattering loss, material absorption loss, and bending loss) of the microrings remains unchanged after the GST deposition and RTA. The loss introduced by GST can then be estimated as the difference in the loss of the microring before and after GST deposition [38]:…”
Section: Resultsmentioning
confidence: 99%
“…ML MoS 2 flakes are obtained from a bulk crystal (SPI Supplies) using mechanical exfoliation. The flakes are dry transferred onto a SiO 2 /Si substrate with pre-written alignment marks 61 . Identification of ML MoS 2 is done using atomic force microscopy (AFM), optical contrast, and PL spectroscopy following documented procedures 61 .…”
Section: Methodsmentioning
confidence: 99%
“…The flakes are dry transferred onto a SiO 2 /Si substrate with pre-written alignment marks 61 . Identification of ML MoS 2 is done using atomic force microscopy (AFM), optical contrast, and PL spectroscopy following documented procedures 61 . Samples are annealed in an Ar/H 2 environment at 400 ºC before patterning with electron beam lithography and reactive ion etching using CHF 3 /O 2 gas.…”
Section: Methodsmentioning
confidence: 99%
“…However, the metal has thermal instability in visible region due to large ohmic loss. The Fabry-perot (F-P) cavity constructed by Bragg reflector can realize strong coupling but the integration is difficult and the volume of whispering gallery modes is large, both of which are difficult to be applied in reality [19][20][21][22][23] . Recently, the guided resonance coupled with WS 2 24 , two-dimensional dielectric photonic crystal slab with WS 2 have been successfully reported to achieve strong coupling between dielectric and excitons 25 .…”
Section: Introductionmentioning
confidence: 99%