2008
DOI: 10.1016/j.renene.2007.12.015
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Silicon nitride film for solar cells

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Cited by 56 publications
(25 citation statements)
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“…4 The rapidly growing photovoltaic industry utilizes thin films of a-SiN x : H to minimize reflection losses of solar cells. 5,6 Thin films of silicon nitride are deposited using different types of chemical-vapor deposition ͑CVD͒ and sputtering. 7,8 The material is nonstoichiometric in general and contains considerable amounts of hydrogen depending on the preparation conditions.…”
Section: Introductionmentioning
confidence: 99%
“…4 The rapidly growing photovoltaic industry utilizes thin films of a-SiN x : H to minimize reflection losses of solar cells. 5,6 Thin films of silicon nitride are deposited using different types of chemical-vapor deposition ͑CVD͒ and sputtering. 7,8 The material is nonstoichiometric in general and contains considerable amounts of hydrogen depending on the preparation conditions.…”
Section: Introductionmentioning
confidence: 99%
“…As shown in figure 9, the weighted reflection is of 8.85%. It is lower than that performed by a single layer of optimal SiN (approximately 10%) [24].…”
Section: Emitter Passivation By Sio 2 /Sin Stackmentioning
confidence: 63%
“…A further cleaning step in HF removes the formed phosphorus silicate glass (PSG) layer produced during diffusion. Next, a silicon nitride layer (SiNx) 5 is deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) acting as an anti reflexion and passivation layer on n-type silicon. Metal contacts are screen printed by using metal pastes (see section 2.2 and 2.3).…”
Section: Discussionmentioning
confidence: 99%