Silicon microspeaker with out-of-plane displacement

Glacer, Christoph; Dehe, A.; Tumpold, David; Laur, R.

doi:10.1109/nems.2014.6908749

Cited by 9 publications

(6 citation statements)

References 16 publications

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“…To generate considerable SPLs and balance the above-mentioned constraints, several approaches in terms of device structure and driving voltage have been applied in the development of electrostatic MEMS speakers [ 9 , 38 , 90 , 91 , 92 ]. One approach to improve SPL is to use multiple speakers, i.e., array structures.…”

Section: Development Of Mems Speakersmentioning

confidence: 99%

Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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Section: Development Of Mems Speakersmentioning

confidence: 99%

Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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“…MEMS μSpeaker approaches rely on the piezoelectric transduction mechanism [1][2][3][4][5][6][7][8] , the electrostatic transduction mechanism [9][10][11][12][13][14][15] , the magnetic transduction mechanism [16][17][18][19][20] and the thermoacoustic transduction mechanism 21,22 . A thorough review paper about micro speakers was recently published by Wang et al 23 .…”

Section: Introductionmentioning

confidence: 99%

The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers

et al. 2022

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Electrostatic actuators are of particular interest for microsystems (MEMS), and in particular for MEMS audio transducers for use in advanced true wireless applications. They are attractive because of their typically low electrical capacitance and because they can be fabricated from materials that are compatible with standard complementary metal-oxide semiconductor (CMOS) technology. For high audio performance and in particular low harmonic distortion (THD) the implementation of the push-pull principle provides strong benefits. With an arrangement of three electrodes in a conjunct moving configuration on a beam, we demonstrate here for the first time a balanced bending actuator incarnating the push-pull principle operating at low voltages. Our first design already exhibits a harmonic distortion as low as 1.2% at 79 dB using a signal voltage of only 6 Vp and a constant voltage of only ±10 Vdc in a standard acoustic measurement setup. Thus, exceeding our previously reported approach in all three key performance indications at the same time. We expect that our novel electrode configurations will stimulate innovative electrostatic actuator developments for a broad range of applications. In this paper we report the basic theory, the fabrication and the performance of our novel actuator design acting as an audio transducer.

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“…In addition, miniaturization and compatibility with CMOS technology are very attractive. Until now, most traditional speakers in use have been manufactured based on dynamic speakers [4], [5] which are based on magnets and suffer from big size. In another hand, electrodynamic speakers are low-priced products.…”

Section: Introductionmentioning

confidence: 99%

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

Fawzy

2022

JES. Journal of Engineering Sciences

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This paper reports piezoelectric aluminium nitride (AlN) based microelectromechanical systems (MEMS) speakers. We introduce a novel geometry of micro speakers based on AlN to meet the requirements of modern applications such as phones, tablets, laptops, and in-ear applications. We introduce the principle, design, and characterization results. The speakers were fabricated on cavity silicon on insulator (SOI) substrate and characterized by using an electroacoustic tester. This paper considers the acoustic performance of the speakers. The results show that the speakers gave us a high sound pressure level (SPL) of more than 78 dB for circle geometry when applying 2 volts on the electrodes. These results are equal for PZT MEMS speakers moreover AlN opens the door to integrate the speakers and the ASIC on the same chip. The size of the different geometries' speakers isn't exceeded 3mm × 3mm. These geometries offer a breakthrough in acoustic performance, a frequency response, and low power consumption

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Silicon microspeaker with out-of-plane displacement

Cited by 9 publications

References 16 publications

Review of Recent Development of MEMS Speakers

Review of Recent Development of MEMS Speakers

The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers

Membraneless Piezoelectric MEMS speakers based on AlN Thin Film

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