Silicon Echelles for Soft X-Ray and Extreme UV Radiation: Influence of the Camber of the Reflective Facet on the Diffraction Efficiency

Goray, L. I.; Berezovskaya, T. N.; Mokhov, D. V.; Sharov, V. A.; Shubina, K. Yu.; Pirogov, E. V.; Dashkov, A. S.

doi:10.1134/s1027451023070145

J. Surf. Investig.

2023

DOI: 10.1134/s1027451023070145

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Silicon Echelles for Soft X-Ray and Extreme UV Radiation: Influence of the Camber of the Reflective Facet on the Diffraction Efficiency

L. I. Goray,

T. N. Berezovskaya,

D. V. Mokhov

et al.

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Silicon Echelles for Soft X-Ray and Extreme UV Radiation: Influence of the Camber of the Reflective Facet on the Diffraction Efficiency

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References 27 publications

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