2017
DOI: 10.1016/j.optmat.2016.09.027
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Silicon carbide thin films with different processing growth as an alternative for energetic application

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Cited by 15 publications
(2 citation statements)
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“…We focus on three kinds of semiconductor materials that attract much interest in the area of traditional semiconductor research and the emergent exploration of quantum technologies. Two of them are diamond [65] and silicon carbide [66], which can be used in the form of bulk materials [22,27], thin films [67,68] and nanoparticles [69][70][71] in scientific research and industrial applications. The last one is h-BN [72], which is usually synthesized to be a two-dimensional material in applications [73,74].…”
Section: Stokes and Anti-stokes Pl Spectra Of Point Defectsmentioning
confidence: 99%
“…We focus on three kinds of semiconductor materials that attract much interest in the area of traditional semiconductor research and the emergent exploration of quantum technologies. Two of them are diamond [65] and silicon carbide [66], which can be used in the form of bulk materials [22,27], thin films [67,68] and nanoparticles [69][70][71] in scientific research and industrial applications. The last one is h-BN [72], which is usually synthesized to be a two-dimensional material in applications [73,74].…”
Section: Stokes and Anti-stokes Pl Spectra Of Point Defectsmentioning
confidence: 99%
“…For example, crystalline films can be obtained using pulsed laser deposition, while the sputtering DC magnetron method makes it possible to obtain amorphous SiC films. 16 The method of combined use of DC magnetron sputtering and high-power pulsed magnetron sputtering makes it possible to deposit almost stoichiometric and nanocrystalline SiC thin films at a Institute of High-Temperature Electrochemistry, Ural Branch of Russian Academy room temperature on silicon (100) substrates. 17 The hardness of the resulting coating and its Young's modulus significantly depend on the pressure of the atomizing gas.…”
Section: Introductionmentioning
confidence: 99%