Silicon anisotropic etching in KOH-isopropanol etchant

Barycka, Irena; Zubel, Irena

doi:10.1016/0924-4247(95)00992-2

Cited by 96 publications

(63 citation statements)

References 7 publications

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“…This value is compatible with that obtained with this type of silicon etching (54.7). [15] This geometry shows that the shrinkage that takes place during the annealing step is essentially isotropic. The high surface energy of the end of the tip is not sufficient to cause substantial deformation and rounding during the sintering at this temperature.…”

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confidence: 94%

Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors

Marzolin¹,

et al. 1998

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This paper demonstrates that the molding of a sol-gel precursor against an elastomeric replica of the desired features (a form of soft lithography) [1] is a convenient method to generate submicrometer patterns of glasses on a substrate. We were able to fabricate glass (silicon dioxide doped with boron oxide, titanium oxide, or aluminum oxide) structures with micrometer-scale features supported on a flat Si/SiO 2 substrate, as well as free-standing membranes.In molding, an initially fluid material is allowed to acquire its final geometry by solidifying in a mold. This technique allows the reproduction of the fine details of the mold: replica molding of structures in polymers has generated structures with 10 nm sized features.[2] The molding of sol-gel precursor solutions has produced monolithic silica pieces [3] as well as Fresnel lenses or gratings with sub-micrometer periods.[4] Replica molding is a method that has several potentially useful features. It does not require photolithography and can be used without access to a clean room. Once the mold is fabricated, many replicas can be produced.[2] It has a theoretical limit to resolution that is much below that that can be achieved by photolithography. It can be used to make patterns on curved substrates. The throughput of a process based on molding can be high and its cost low. Unlike electron-beam or scanning tunneling microscopy (STM) writing, molding allows parallel fabrication. We believe that micro-molding is a type of process that will be widely useful in microfabrication. The sol-gel process is a versatile method for synthesizing many inorganic oxides.[5] This method generates materials with controlled chemical composition and low levels of impurities. Most common glasses, with the exception of some halide glasses, have been successfully synthesized; these compositions range from high purity silica to an eight-component glass ceramic. [6] Other materials that have been prepared by sol-gel process include PZT ceramics (i.e., Pb(Zr,Ti)O 3 ), [7,8] electro-optic films, [9] high efficiency phosphors, [10] and electrochromic glasses.[11]The use of sol-gel chemistry to prepare materials has one unattractive characteristic: the shrinkage induced in the drying stage gives rise to high stresses in the structures. These stresses can cause the deformation and breaking of the structures. In order to reduce these stresses, drying additives can be used.[12] The incorporation of non-hydrolyzing organic groups in the material (methyl or phenyl) gives structures with higher compliance and allows structural relaxation during the drying stage.[13] Controlled slow drying can also decrease the risk of cracking of the glass; it will, however, result in long process times. Good adhesion of the glass to the substrate is necessary to prevent the delamination of the structure. We wished to fabricate glass structures with dimensions in the range of 0.1 mm to several micrometers by non-lithographic methods, and have examined the molding of solgels in an elastomeric mold. This pape...

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confidence: 94%

Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors

Marzolin¹,

et al. 1998

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“…Moreover, the etch rates are significantly affected by the impurities (or additives) in the etchant. A low concentration of IPA in KOH [33,[129][130][131][132][133] and a very small concentration of surfactant (e.g. 0.1% v/v) in TMAH [134][135][136][137][138][139][140][141][142][143][144][145][146][147] ensure a significant reduction in the etch rates of {110} and its vicinal planes (or the planes between {110} and {111} surfaces such as {441}, {331}, {221}, etc.).…”

Section: Difference Between Etch Rate Underetching and Undercuttingmentioning

confidence: 99%

A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching

Pal

Sato

2015

Micro and Nano Syst Lett

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“…In Fig. 3 Barycka and Zubel (1995 During conventional MCHS fabrication using AE110ae wafers, the etched structures at the ends of the microchannels are usually ignored because they are cut away to fit the geometric shape of the chips. The structures at the end of the etched microchannels for the W ch =500 lm case shown in Fig.…”

Section: Conventional Mchsmentioning

confidence: 99%

Microchannel heat sink fabrication with roughened bottom walls

2006

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Simple bulk wet anisotropic etching procedures that create roughened microstructures along the bottom walls of microchannel heat sinks are presented. The roughened bottom wall is intended to promote flow disturbance and heat transfer enhancement. The basic principle of this study is to utilize the crystal orientation characteristics of [110] silicon wafers during etching. We first fabricated the microchannel with vertical sidewalls and a bottom wall with a direction of [110]. An experiment is carried out to show that hexagon-like cavities can be produced on the {110} plane using a mask containing parallelograms. The hexagon-like cavity is produced in the microchannel bottom wall also in [110] direction. In this way, microchannel heat sinks with roughened bottom walls can be produced

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Silicon anisotropic etching in KOH-isopropanol etchant

Cited by 96 publications

References 7 publications

Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors

Fabrication of Glass Microstructures by Micro-Molding of Sol-Gel Precursors

A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching

Microchannel heat sink fabrication with roughened bottom walls

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