2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) 2021
DOI: 10.1109/eurosoi-ulis53016.2021.9560187
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Silicon and hafnia thin film transfer on c-plane sapphire: effect of substrate thickness on the ferroelectric hafnia properties

V. A. Antonov
1
,
Sergey Tarkov
2
,
V. Popov
3
et al.
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