Silicon accelerometer with differential Frequency Modulation and continuous self-calibration

Trusov, Alexander A.; Zotov, Sergei A.; Simon, Brenton R.; Shkel, Andrei M.

doi:10.1109/memsys.2013.6474168

Cited by 39 publications

(26 citation statements)

References 4 publications

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“…6). As could be expected, (17) and (18) yield similar results when the DC bias is small ( 1   ) but overestimate the value of 0 v . For finite values of  , the two methods no longer agree: while transient simulation of (1) show that (18) fails to predict the correct resonant pull-in condition for finite values of  , the results obtained with (17) are very accurate.…”

Section: Application To Square-wave Actuationsupporting

confidence: 75%

“…The smallest value of 0 v for which the system is unstable is noted down. These results are compared with those obtained with (17) and (18) (Fig. 6).…”

Section: Application To Square-wave Actuationmentioning

confidence: 82%

“…This paper is dedicated to the latter case, in which feedback electronics sense the position of the resonator and actuate it close to its resonance frequency by enforcing a set of so-called "self-oscillation" conditions (Barkhausen criterion) [11]. Although the electrostatic closed-loop scheme is ubiquitous [12][13][14][15][16][17], its stability has received little attention so far. Most papers dedicated to resonant pull-in are concerned with open-loop techniques [6][7][8], in which the excitation frequency is controlled and the amplitude and phase of the displacement are free to vary.…”

Section: Fig1 -Open-loop (A) and Closed-loop (B) Techniques For Resomentioning

confidence: 99%

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Analysis of resonant pull-in of micro-electromechanical oscillators

Jerome¹

2015

Journal of Sound and Vibration

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International audienceIn this paper, the equations governing the pull-in of electrostatic MEMS (micro-electromechanical systems) oscillators are established and analyzed. This phenomenon defines the maximal oscillation amplitude that can be obtained without incurring instability and, hence, an upper limit to the performance of a given device. The proposed approach makes it possible to accurately predict pull-in behaviour from the purely resonant case, in which the electrostatic bias is very small, to the static case. The method is first exposed in the case of a parallel-plate resonator and the influence of the excitation waveform on the resonant pull-in characteristics is assessed. It is then extended to the more complex case of clamped-clamped and cantilever beams. The results are validated by comparison with transient simulations

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Section: Application To Square-wave Actuationsupporting

confidence: 75%

“…The smallest value of 0 v for which the system is unstable is noted down. These results are compared with those obtained with (17) and (18) (Fig. 6).…”

Section: Application To Square-wave Actuationmentioning

confidence: 82%

Section: Fig1 -Open-loop (A) and Closed-loop (B) Techniques For Resomentioning

confidence: 99%

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Analysis of resonant pull-in of micro-electromechanical oscillators

Jerome¹

2015

Journal of Sound and Vibration

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“…A vertical resonant accelerometer based on a nanoelectromechanical oscillator is beneficially attempted in the literature [ 14 ]. The work in [ 15 ] presents a new resonant silicon accelerometer based on differential frequency modulation. The in-plane accelerometer is transformed into frequency variation by electrostatic stiffness.…”

Section: Introductionmentioning

confidence: 99%

A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

Yang

Wang

Dai

et al. 2015

Sensors

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Presented in the paper is the design, the simulation, the fabrication and the experiment of a new z-axis resonant accelerometer based on the electrostatic stiffness. The new z-axis resonant micro-accelerometer, which consists of a torsional accelerometer and two plane resonators, decouples the sensing movement of the accelerometer from the oscillation of the plane resonators by electrostatic stiffness, which will improve the performance. The new structure and the sensitive theory of the acceleration are illuminated, and the equation of the scale factor is deduced under ideal conditions firstly. The Ansys simulation is implemented to verify the basic principle of the torsional accelerometer and the plane resonator individually. The structure simulation results prove that the effective frequency of the torsional accelerometer and the plane resonator are 0.66 kHz and 13.3 kHz, respectively. Then, the new structure is fabricated by the standard three-mask deep dry silicon on glass (DDSOG) process and encapsulated by parallel seam welding. Finally, the detecting and control circuits are designed to achieve the closed-loop self-oscillation, to trace the natural frequency of resonator and to measure the system frequency. Experimental results show that the new z-axis resonant accelerometer has a scale factor of 31.65 Hz/g, a bias stability of 727 μg and a dynamic range of over 10 g, which proves that the new z-axis resonant micro-accelerometer is practicable.

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“…High performance applications still require better resolution, sensitivity, dynamic range and long-term sensitivity than the current state-of-the-art. So far the approaches used to deliver high performance accelerometers have been based on highorder ∑Δ modulators [1], [2] and more recently, resonance frequency modulation [3]. The first has shown a noise level of 1-2µg/√Hz and a bias stability of 10µg over 1hour and ±100µg after 24 hours, with temperature compensation and complex 4th order ∑Δ modulators while the latter has shown 1mg bias drift over 6 hours and a noise level of 10 µg/√Hz.…”

Section: Introductionmentioning

confidence: 99%

High-performance pull-in time accelerometer

Dias

Alves

Costa

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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A closed-loop accelerometer based on electrostatic pullin time is presented here. The main goal is to achieve highperformance, namely in respect to noise and sensitivity, with a very simple readout mechanism. An integrated system was implemented comprising actuation and readout circuitry, FPGA and MEMS sensor. It presents a good performance in comparison to the state-of-the-art. Experimental measurements have shown a sensitivity of 61.3 V 2 /g, dynamic range of 110 dB and a noise level set below 3 µg/√Hz, by the mechanical-thermal noise only. The measured bias stability is better than ±250µg over 48h with temperature control of ±1ºC. KEYWORDSElectrostatic pull-in, pull-in time, closed-loop accelerometer.

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Silicon accelerometer with differential Frequency Modulation and continuous self-calibration

Cited by 39 publications

References 4 publications

Analysis of resonant pull-in of micro-electromechanical oscillators

Analysis of resonant pull-in of micro-electromechanical oscillators

A New Z-axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness

High-performance pull-in time accelerometer

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