Significant increase of UV reflectivity of SiC galvanometer mirror scanners for the high-power laser applications

Belosludtsev, Alexandr; Buinovskis, Deividas

doi:10.1016/j.optlastec.2021.107027

Cited by 6 publications

(1 citation statement)

References 35 publications

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“…Currently, they serve the key part in multiple applications such as medical devices, optics, and microelectronics [1]. Targeting at withstanding extreme working environments and specific task requirements, kinds of components (such as artificial implants [2], silicon carbide (SiC) galvanometer mirror [3], electronic packaging ceramic substrate [4].) not only need enough strength to meet the reliability，but also require maintain the ultra-precision surface/subsurface integrity.…”

Section: Introductionmentioning

confidence: 99%

A novel wheel-type vibration-magnetorheological compound finishing method

Yan

Lin

et al. 2023

Int J Adv Manuf Technol

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Magnetorheological finishing (MRF) is an important technique to achieve the surface precision of difficult-to-cut materials. In this paper, a wheel-type vibration-magnetorheological compound finishing is proposed in terms of reducing the unidirectional scratch caused by the wheel type magnetorheological finishing tool and further improving the convergence rate of surface roughness. The vibration-magnetorheological coupling was realized through utilizing designed magnetorheological finishing (MRF) wheel and a nonresonant vibrational device (NRVD). Through the theoretical and experimental analysis, the surface roughness has been verified improved through increasing the normal and tangential forces, which are associated with introducing 2D vibration. The flow and viscoelastic models of the MRP fluid were established based on hydrodynamic lubrication and viscoelasticity theories. Finally, the feasibility of the proposed finishing method was verified by the results of improving surface roughness through designing reasonable processing experiment.

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Section: Introductionmentioning

confidence: 99%