Significant conductivity enhancement in Al-rich n-AlGaN by modulation doping
Xuzhou Fang,
Jiaming Wang,
Fujun Xu
et al.
Abstract:Enhancing the conductivity in Al-rich n-AlGaN is a key issue for realizing AlGaN-based ultraviolet light-emitting diodes (UV-LEDs) with low operating voltage and high wall-plug efficiency, especially in a planar geometry of flip–chip configuration. An approach of modulation doping is herein proposed, where an alternating-layer structure consisting of Si-doped and unintentionally doped AlGaN is assembled to achieve the spatial separation of electron activation and transport. As massive electrons diffuse from th… Show more
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