Si-planar-pellistor: designs for temperature modulated operation

Aigner, Robert; Dietl, Markus; Katterloher, Rainer; Klee, V.

doi:10.1016/0925-4005(96)01947-8

Cited by 37 publications

(13 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…State-of-the-art, low-power sensors for portable instrument applications employ filaments formed from 12.5 m (diameter) wire! Throughout the past decade, there has been an increasing number of reports of microfabrication (MEMS) techniques for preparation of catalytic detectors [21]- [30]. A typical approach is deposition of a Pt resistor (meander) onto a membrane material (SiN) followed by application of a catalytic layer similar to those described earlier in this section [29], [30].…”

Section: Design and Operation Considerationsmentioning

confidence: 99%

Catalytic sensors for monitoring explosive atmospheres

Miller

2001

IEEE Sensors J.

View full text Add to dashboard Cite

Catalytic sensors have a long history of use in environmental health and safety applications for detection of potentially explosive atmospheres. The active element of the modern sensor is a sophisticated microcalorimeter that measures the heat of combustion liberated as the combustible analyte is oxidized on its catalytic surface. A well-designed sensor is sensitive for a wide range of hydrocarbon gases, provides a linear response with increasing concentration, and consumes little power. Environmental catalyst poisons, such as volatile silicones and sulfur compounds, pose the greatest threat to long sensor life. Fortunately, several approaches to eliminate or reduce the effects of poisons are available. Future catalytic sensors are likely to be smaller and more energy efficient than today's models, reflecting trends in portable instrument design.

show abstract

Section: Design and Operation Considerationsmentioning

confidence: 99%

Catalytic sensors for monitoring explosive atmospheres

Miller

2001

IEEE Sensors J.

View full text Add to dashboard Cite

show abstract

“…CMOS-based sensor structures include surface-micromachined, free-standing, Pt-coated polysilicon micro-filaments separated from the substrate by an air gap [28,29] or micromachined membranes [30][31][32][33][34]. Heat losses to the silicon frame are minimized in both designs.…”

Section: Catalytic Thermal Sensors (Pellistors)mentioning

confidence: 99%

CMOS Single Chip Gas Detection Systems — Part I

et al. 2002

View full text Add to dashboard Cite

The current trend to control indoor air-quality and to monitor environmental pollution has created a strong demand for miniaturized and inexpensive gas sensors for volatile organic compounds (VOCs). Gas sensor arrays based on industrial CMOS-processes combined with post-CMOS micromachining (CMOS MEMS) are a promising approach to low-cost sensor devices. In this article, the state of research of CMOS-based gas sensor systems is reviewed, and a platform technology is described, which provides the possibility of monolithically integrating several different transducers on a single chip. A design environment, batch-fabrication processes, and fast testing procedures were developed to realize an example single-chip gas detection system. The chip includes the transducers, their biasing circuitry, reference elements, a digital interface, and a temperature sensor. The three polymer-based transducers and their interface electronics will be detailed in the second part of this article [1].

show abstract

“…These are the fabrication steps: 1) bulk micromachining: backside etching (KOH) to achieve a membrane structure [65], [68], [69]; 2) surface micromachining: sacrificial layer etching (HF) for the bridges [66], [67]; 3) Pt or catalyst deposition: sputtering [70], evaporation [68], [69], and LPCVD [66], [67].…”

Section: B Thermal Sensorsmentioning

confidence: 99%

Microfabrication techniques for chemical/biosensors

et al. 2003

View full text Add to dashboard Cite

Microfabrication processes for chemical and biochemical sensors are reviewed. Standard processing steps originating from semiconductor technology are detailed, and specific micromachining steps to fabricate three-dimensional mechanical structures are described. Fundamental chemical sensor principles are briefly abstracted and corresponding state-of-the-art examples of microfabricated chemical sensors and biosensors are given. The advantages and disadvantages of either fabricating devices in IC fabrication technology with additional microfabrication steps, or of using custom-designed nonstandard microfabrication process flows are debated. Finally, monolithic integrated chemical and biological microsensor systems are presented, which include transducer structures and operation circuitry on a single chip.

show abstract

Si-planar-pellistor: designs for temperature modulated operation

Cited by 37 publications

References 4 publications

Catalytic sensors for monitoring explosive atmospheres

Catalytic sensors for monitoring explosive atmospheres

CMOS Single Chip Gas Detection Systems — Part I

Microfabrication techniques for chemical/biosensors

Contact Info

Product

Resources

About