Abstract:We perform quantitative analysis
of the X-ray absorption data taken in situ during
the earliest cycles of the ZnO atomic layer
deposition on atomically flat InGaAs (001) surfaces. As deposition
progresses, we observe a transition from an amorphous structure to
a nanocrystalline one. The former retains much of the characteristics
of a ZnO crystal in the Zn coordination shell, while the latter shows
atomic ordering up to at least the third neighbor shell of Zn atoms,
despite the absence of Bragg X-ray diffractio… Show more
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